Maintenance member, substrate holding module, plating apparatus, and maintenance method
AssigneeEbara Corporation
InventorMasayuki Satake
Life of this patent
Estimating the term…
Abstract
Provided is a maintenance member or the like capable of easily maintaining an electric contact in a substrate holder. It relates to a maintenance member to maintain a substrate holder including an electric contact configured to supply power to a substrate. The maintenance member includes an abrasive body having a shape corresponding to the substrate that is a holding target of the substrate holder, and disposed to come in contact with the electric contact when held by the substrate holder.
Claims10
A maintenance member to maintain a substrate holder including an electric contact configured to supply power to a substrate, the maintenance member comprising:
- an abrasive body having a shape corresponding to the substrate that is a holding target of the substrate holder, and disposed to come in contact with the electric contact when held by the substrate holder.
A substrate holding module comprising:
- a first holding member including an electric contact configured to supply power to a substrate, and
- a second holding member configured to hold the substrate between the first holding member and the second holding member, the second holding member including an abrasive body disposed at a position corresponding to the electric contact in the first holding member.
Dependencies are inferred from the claim text.