Coating Apparatus and Movable Electrode Arrangement, Movable Support Arrangement, and Application Thereof
AssigneeJiangsu Favored Nanotechnology Co., Ltd.
InventorJian ZONG
Life of this patent
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Abstract
A coating apparatus and movable electrode arrangement, movable support arrangement, and application thereof are disclosed. The coating apparatus includes a reactor chamber body and a movable support arrangement. The reactor chamber body has a reactor chamber. The movable support arrangement is received in the reactor chamber and includes one or more electrodes and a movable support. The movable support is adapted for rotating relative to the reactor chamber body. At least one of the electrodes is arranged on the movable support so as for rotating together with the movable support. One or more workpieces to be coated are adapted for being held on the movable support to move together with the movable support.
Claims31
1-102. (canceled)
A coating apparatus for coating one or more workpieces, comprising:
- a reactor chamber body having a reactor chamber and a feed inlet communicating with said reactor chamber;
- a feeding arrangement communicatively connected to said feed inlet for feeding a reactant gas in said reactor chamber;
- a gas extracting arrangement communicatively connected with said reactor chamber body for extracting the reactant gas;
- and
- a movable support arrangement, which is movably received in said reactor chamber, comprising:
- one or more electrodes;
- and
- a movable support, arranged in a movable manner relative to the reactor chamber body, wherein said one or more electrodes are arranged on said movable support in a manner that said one or more electrodes are movable together with said movable support for forming an ionized environment when said one or more electrodes are electrified for ionizing the reactant gas in said reactor chamber for depositing on one or more surfaces of the one or more workpieces, which are supported on said movable support and moved together with said movable support, for forming coating layers on the one or more surfaces of the one or more workpieces.
Dependencies are inferred from the claim text.