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US 2021/0249291 A1Published application
Conveying Device for Conveying at Least One Wafer
AssigneeRobert Bosch GmbH
InventorsHeike Raatz, Bas Verhelst, Joachim Frangen
Life of this patent
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Abstract
A conveying device for conveying at least one wafer includes at least one transport body that is designed at least for supporting or holding a wafer. The conveying device is designed to move the at least one transport body at least two-dimensionally on a conveying surface.
Claims12
A conveying device for conveying at least one wafer, comprising:
- at least one transport body configured at least to carry or hold at least one wafer,
- wherein the conveying device is configured to move the at least one transport body at least two-dimensionally on a conveying surface.
A method for operating a conveying device, comprising:
- freely moving at least one transport body, which is configured to carry or hold at least one wafer, on a conveying surface into a desired position and/or orientation with the conveying device, which is configured to move the at least one transport body at least two-dimensionally on the conveying surface.
Dependencies are inferred from the claim text.