X-ray tube, x-ray analysis apparatus, and method of cooling target in x-ray tube
AssigneeRigaku Corporation
InventorMasaaki YAMAKATA
Life of this patent
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Abstract
Provided is an X-ray tube, including: an electron-beam emitting unit; a target having a first surface and a second surface; a solid heat diffusion member fixed onto the second surface of the target; and a flow-path forming member, which is arranged on a side of the solid heat diffusion member, the side being opposite to the target, and that is configured to define a film flow path in which a cooling fluid forms a film flow that is parallel to a surface shape of the solid heat diffusion member. A protruding portion protrudes toward the side of the solid heat diffusion member, which is opposite to the target. The film flow path has a shape extending along at least a part of a surface of the protruding portion.
Claims12
An X-ray tube, comprising:
- an electron-beam emitting unit configured to emit an electron beam;
- a target having a first surface against which the electron beam collides and a second surface on a side opposite to the first surface;
- a solid heat diffusion member fixed onto the second surface of the target;
- and
- a flow-path forming member, which is arranged on a side of the solid heat diffusion member, the side being opposite to the target, and that is configured to define a film flow path in which a cooling fluid forms a film flow,
- wherein a protruding portion protruding toward the side of the solid heat diffusion member, which is opposite to the target, is formed to fall within a region including a heat generation center at which the electron beam collides against the target to generate heat when viewed in a direction of emission of the electron beam, and
- wherein the film flow path has a shape extending along at least a part of a surface of the protruding portion.
A method of cooling a target in an X-ray tube, the method comprising cooling a target by causing a cooling fluid for cooling the target to flow through a film flow path in which an average flow velocity of the cooling fluid in a peripheral region around a heat generation center at which an electron beam collides against the target to generate heat is larger than an average flow velocity of the cooling fluid at the heat generation center when viewed in a direction of emission of the electron beam.
Dependencies are inferred from the claim text.