# US 2021/0243845 A1 · Substrate fixing device

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- Number: US 2021/0243845 A1
- Document ID: US20210243845A1
- Status: Published application
- Kind: A1
- Application number: 17/160,918
- Filed: 2021-01-28
- Published: 2021-08-05
- Earliest claimed: 2020-01-31
- Assignees: Shinko Electric Industries Co., Ltd.
- Applicants: Shinko Electric Industries Co., Ltd.
- Inventors: Akihiro Kuribayashi; Riku Nishikawa
- Web page: https://patentgrep.com/patent/US20210243845A1

## CPC

- H05B 3/06: Heater elements structurally combined with coupling elements or holders
- H10P 72/0436: {mainly by radiation}
- H05B 3/0047: {for semiconductor manufacture}
- H05B 3/283: {the insulating material being an inorganic material, e.g. ceramic}
- H10P 72/0432: {mainly by conduction}
- H10P 72/0602: {Temperature monitoring}
- H10P 72/72: using electrostatic chucks
- H10P 72/722: {Details of electrostatic chucks}
- H05B 2203/032: Heaters specially adapted for heating by radiation heating
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A substrate fixing device includes: an electrostatic chuck that is configured to adsorb and retain an object thereon, and including a base body on which the object is mounted, and an electrostatic electrode that is provided in the base body; and a base plate on which the electrostatic chuck is mounted, and having a plurality of through holes each exposing a first face of the base body facing the base plate. Laser light is emitted from each of the through holes toward the base body.

## Claims

### Claim 1

A substrate fixing device comprising:
an electrostatic chuck that is configured to adsorb and retain an object thereon, and comprising a base body on which the object is mounted, and an electrostatic electrode that is provided in the base body; and
a base plate on which the electrostatic chuck is mounted, and having a plurality of through holes each exposing a first face of the base body facing the base plate,
wherein laser light is emitted from each of the through holes toward the base body.

### Claim 2 (depends on 1)

The substrate fixing device according to claim 1, further comprising:
a plurality of optical fibers each of which is configured to emit laser light toward the base body and disposed in a corresponding one of the through holes.

### Claim 3 (depends on 2)

The substrate fixing device according to claim 2, wherein:
the base body is divided into a plurality of regions;
each of temperatures of the regions is controlled independently; and
each of the optical fibers is disposed in a corresponding one of the regions.

### Claim 4 (depends on 3)

The substrate fixing device according to claim 3, wherein:
a first optical fiber of the optical fibers is disposed in a first region of the regions; and
laser light emitted from the first optical fiber is radiated toward the first region so that the first region is heated.

### Claim 5 (depends on 2)

The substrate fixing device according to claim 2, wherein:
a plurality of recesses are formed in the first face of the base body; and
each of the recesses faces a corresponding one of the optical fibers.

### Claim 6 (depends on 1)

The substrate fixing device according to claim 1, wherein:
the base body contains alumina as a main component, and a wavelength band o the f laser light is an infrared region.

### Claim 7 (depends on 2)

The substrate fixing device according to claim 2, further comprising:
an adhesive layer that is provided between the first face of the base body and the base plate to fix the electrostatic chuck and the base plate to each other,
wherein:
the through holes are formed in the base plate and the adhesive layer so as to expose the first face of the base body; and
front ends of the optical fibers are positioned in the through holes formed in the adhesive layer.

### Claim 8 (depends on 1)

The substrate fixing device according to claim 1, wherein
the electrostatic chuck further comprises a heating element provided in the base body.