# US 2021/0242858 A1 · Multifunctional logic device and method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0242858 A1 - Document ID: US20210242858A1 - Status: Published application - Kind: A1 - Application number: 17/165,567 - Filed: 2021-02-02 - Published: 2021-08-05 - Earliest claimed: 2020-02-05 - Assignees: King Abdullah University of Science and Technology - Applicants: King Abdullah University of Science and Technology - Inventors: Sherif Adekunle TELLA; Mohammad Ibrahim YOUNIS - Web page: https://patentgrep.com/patent/US20210242858A1 ## CPC - H03H 9/2463: {Clamped-clamped beam resonators} - H02N 2/00: Electric machines in general using piezoelectric effect, electrostriction or magnetostriction (generating mechanical vibrations in general B06B; piezoelectric, electrostrictive or magnetostrictive devices in general H10N30/00) - H03H 9/02259: {Driving or detection means} - H03K 19/02: using specified components ({H03K19/0005 - H03K19/0021}, H03K19/003 - H03K19/0175 take precedence) - H03H 2009/02488: {Vibration modes} - H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR - H03K: PULSE TECHNIQUE (measuring pulse characteristics G01R; modulating sinusoidal oscillations with pulses H03C; transmission of digital information H04L; discriminator circuits detecting phase difference between two signals by counting or integrating cycles of oscillation H03D3/04; automatic control, starting, synchronisation or stabilisation of generators of electronic oscillations or pulses where the type of generator is irrelevant or unspecified H03L; coding, decoding or code conversion, in general H03M) ## Abstract A logic system includes a microelectromechanical system, MEMS, resonator having an arch beam and first and second side beams, wherein the first side beam is attached with a first end to a first end of the arch beam and the second side beam is attached with a first end to a second end of the arch beam to form a U-shape; an input electrode facing the second side beam; a selector electrode facing the second side beam; a first output electrode facing the first side beam; and a second output electrode facing the arch beam. ## Claims ### Claim 1 A logic system comprising: a microelectromechanical system, MEMS, resonator having an arch beam and first and second side beams, wherein the first side beam is attached with a first end to a first end of the arch beam and the second side beam is attached with a first end to a second end of the arch beam to form a U-shape; an input electrode facing the second side beam; a selector electrode facing the second side beam; a first output electrode facing the first side beam; and a second output electrode facing the arch beam. ### Claim 2 (depends on 1) The logic system of claim 1, wherein a second end of the first side beam and a second end of the second side beam are fixedly attached to a substrate. ### Claim 3 (depends on 2) The logic system of claim 2, wherein only the second end of the first side beam and only the second end of the second side beam out of the first side beam, the second side beam, and the arch beam are attached to the substrate. ### Claim 4 (depends on 2) The logic system of claim 2, wherein the entire arch beam is floating above the substrate. ### Claim 5 (depends on 1) The logic system of claim 1, wherein the MEMS resonator has first and second resonant frequencies. ### Claim 6 (depends on 5) The logic system of claim 5, further comprising: a first driving electrode that together with the first output electrode sandwich the first side beam; and a second driving electrode that together with the second output electrode sandwich the arch beam. ### Claim 7 (depends on 6) The logic system of claim 6, wherein the first driving electrode and the second driving electrode drive the MEMS structure at a first operating frequency or a second operating frequency. ### Claim 8 (depends on 7) The logic system of claim 7, wherein the first operating frequency is smaller than the first resonant frequency, and the second operating frequency is smaller than the second resonant frequency. ### Claim 9 (depends on 7) The logic system of claim 7, wherein the first operating frequency is changed to the first resonant frequency when the first and second driving electrodes are biasing the MEMS resonator with a given first voltage, and the input electrode and the selector electrode apply a given second voltage. ### Claim 10 (depends on 7) The logic system of claim 7, wherein the second operating frequency is changed to the second resonant frequency when the first and second driving electrodes are biasing the MEMS resonator with a given first voltage, the input electrode applies a given second voltage, and the selector electrode applies a zero voltage. ### Claim 11 (depends on 1) The logic system of claim 1, wherein a length of the arch beam, the first side beam and the second side beam is each smaller than 400 μm. ### Claim 12 A logic system comprising: a substrate extending in a plane; a microelectromechanical system, MEMS, resonator having a first side beam, an arch beam, and a second side beam connected in series to each other and attached at only two ends to the substrate; an input electrode facing the second side beam; a selector electrode facing the second side beam; a first output electrode facing the first side beam; and a second output electrode facing the arch beam, wherein the entire arch beam and parts of the first and second side beams are free to move substantially perpendicular to the substrate. ### Claim 13 (depends on 12) The logic system of claim 12, wherein a second end of the first side beam and a second end of the second side beam are fixedly attached to the substrate. ### Claim 14 (depends on 13) The logic system of claim 13, wherein only the second end of the first side beam and only the second end of the second side beam out of the first side beam, the second side beam, and the arch beam are attached to the substrate. ### Claim 15 (depends on 13) The logic system of claim 13, wherein the entire arch beam is floating above the substrate. ### Claim 16 A method for generating low and high states with a logic system, the method comprising: applying a first voltage to a microelectromechanical system, MEMS, resonator having an arch beam and first and second side beams, wherein the first side beam is attached with a first end to a first end of the arch beam and the second side beam is attached with a first end to a second end of the arch beam to form a U-shape; applying a second voltage to an input electrode facing the second side beam and a selector electrode facing the second side beam to tune a first resonant frequency of a first mode to a first operating frequency to generate a first output (OUT1) at a first output electrode facing the first side beam; and applying the second voltage only to the input electrode and a zero voltage to the selector electrode to tune a second resonant frequency of a second mode to a second operating frequency to generate a second output (OUT2), at a second output electrode facing the arch beam. ### Claim 17 (depends on 16) The method of claim 16, further comprising: generating the first operating frequency by applying a first voltage to the MEMS resonator with first and second driving electrodes, wherein the first driving electrode together with the first output electrode sandwich the first side beam, and wherein the second driving electrode together with the second output electrode sandwich the arch beam. ### Claim 18 (depends on 16) The method of claim 16, wherein a second end of the first side beam and a second end of the second side beam are fixedly attached to a substrate. ### Claim 19 (depends on 18) The method of claim 18, wherein only the second end of the first side beam and only the second end of the second side beam out of the first side beam, the second side beam, and the arch beam are attached to the substrate. ### Claim 20 (depends on 18) The method of claim 18, wherein the entire arch beam is floating above the substrate.