# US 2021/0242856 A1 · Vibrator element and vibrator device

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- Number: US 2021/0242856 A1
- Document ID: US20210242856A1
- Status: Published application
- Kind: A1
- Application number: 17/160,882
- Filed: 2021-01-28
- Published: 2021-08-05
- Earliest claimed: 2020-01-30
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Osamu Kawauchi; Masashi Shimura; Shogo Sasaki
- Web page: https://patentgrep.com/patent/US20210242856A1

## CPC

- H03H 9/0547: {consisting of a vertical arrangement (H03H9/0566 takes precedence)}
- H03H 9/132: {characterized by a particular shape}
- H03H 3/04: for obtaining desired frequency or temperature coefficient
- H03H 9/0557: {the other elements being buried in the substrate}
- H03H 9/1021: {the BAW device being of the cantilever type}
- H03H 9/19: consisting of quartz
- H03H 9/215: consisting of quartz
- H03H 2003/022: {the resonators or networks being of the cantilever type}
- H03H 2003/026: {the resonators or networks being of the tuning fork type}
- H03H 2003/0428: {of an electrode}
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

The vibrator element includes a base part, a vibrating arm extending from the base part, and a weight provided to the vibrating arm, wherein the weight includes a thick film part, a thin film part thinner in film thickness than the thick film part, and a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.

## Claims

### Claim 1

A vibrating element comprising:
a base part;
a vibrating arm extending from the base part; and
a weight provided to the vibrating arm, wherein
the weight includes
a thick film part,
a thin film part thinner in film thickness than the thick film part, and
a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.

### Claim 2 (depends on 1)

The vibrator element according to claim 1, wherein
the thin film part and the connection part are each a laser-processed part which is irradiated with a laser beam to be formed as a thin film.

### Claim 3 (depends on 2)

The vibrator element according to claim 2, wherein
the thin film part is located at a tip side of the vibrating arm with respect to the thick film part.

### Claim 4 (depends on 1)

The vibrator element according to claim 1, wherein a tilt angle of the connection part is equal to or smaller than 60°.

### Claim 5 (depends on 1)

The vibrator element according to claim 1, wherein a tilt angle of the connection part is equal to or larger than 20°.

### Claim 6

A vibrator device comprising:

### Claim at position 7 (depends on 1)

the vibrator element according to claim 1.