# US 2021/0242647 A1 · Contact-type power supply apparatus and contact unit

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- Number: US 2021/0242647 A1
- Document ID: US20210242647A1
- Status: Published application
- Kind: A1
- Application number: 17/233,969
- Filed: 2021-04-19
- Published: 2021-08-05
- Earliest claimed: 2018-10-17
- Assignees: Ulvac, Inc.
- Applicants: Ulvac, Inc.
- Inventors: Shuuji SAITOU
- Web page: https://patentgrep.com/patent/US20210242647A1

## CPC

- H01R 39/64: Devices for uninterrupted current collection
- C23C 14/3407: {Cathode assembly for sputtering apparatus, e.g. Target}
- H01J 37/3435: {Target holders (includes backing plates and endblocks)}
- H01J 37/3488: {Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus}
- H01R 39/26: Solid sliding contacts, e.g. carbon brush
- H01R: ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A contact-type power supply apparatus includes: a first cylindrical body; a second cylindrical body configured to surround the first cylindrical body, be disposed concentrically to the first cylindrical body, and be rotatable around a central axis of the first cylindrical body; an annular body configured to surround the first cylindrical body, be disposed concentrically to the first cylindrical body, be in non-contact with the second cylindrical body, and have an end surface being an inclined surface having a tapered shape; and a contact body configured to face the annular body in an axial direction of the first cylindrical body, be electrically connected to the second cylindrical body, rotate around the central axis around the first cylindrical body together with the second cylindrical body, have a contact surface that is in contactable with the inclined surface, and receive an electric potential of the annular body by sliding with the annular body.

## Claims

### Claim 1

A contact-type power supply apparatus, comprising:
a first cylindrical body;
a second cylindrical body configured to surround the first cylindrical body, to be disposed concentrically to the first cylindrical body, and to be rotatable around a central axis of the first cylindrical body;
an annular body configured to surround the first cylindrical body, to be disposed concentrically to the first cylindrical body, to be in non-contact with the second cylindrical body, and to have an end surface being an inclined surface having a tapered shape; and
a contact body configured to face the annular body in an axial direction of the first cylindrical body, to be electrically connected to the second cylindrical body, to rotate around the central axis around the first cylindrical body together with the second cylindrical body, to have a contact surface in contactable with the inclined surface, and being capable of receiving an electric potential of the annular body by sliding with the annular body.

### Claim 2 (depends on 1)

The contact-type power supply apparatus according to claim 1, wherein
the contact body is configured to be pressed against the second cylindrical body when the contact body is pressed against the inclined surface of the annular body.

### Claim 3 (depends on 1)

The contact-type power supply apparatus according to claim 1, further comprising
an annular support that is fixed to the second cylindrical body, surrounds the first cylindrical body, and support the contact body,
the support being configured to rotate around the central axis together with the second cylindrical body and the contact body,
a relative distance between the support and the contact body in the axial direction being variable.

### Claim 4 (depends on 3)

The contact-type power supply apparatus according to claim 3, wherein
the contact body is divided into at least two parts in a direction, the second cylindrical body rotates in the direction, and
the relative distance of each of the at least two parts is independently variable.

### Claim 5 (depends on 1)

The contact-type power supply apparatus according to claim 1, wherein
the second cylindrical body is surrounded by the annular body, and
the contact body faces the annular body in a direction of the central axis.

### Claim 6 (depends on 3)

The contact-type power supply apparatus according to claim 3, wherein
the contact body includes a guide pin that protrudes toward the support,
the guide pin is configured to be inserted into and supported by the support, and
the guide pin is configured to be slidable in the axial direction with respect to the support.

### Claim 7 (depends on 6)

The contact-type power supply apparatus according to claim 6, wherein
an elastic member is disposed around the guide pin, and
the contact body is in contactable with the annular body by a repulsive force of the elastic member between the contact body and the support.

### Claim 8 (depends on 6)

The contact-type power supply apparatus according to claim 6, wherein
a gap is provided between the guide pin and the support.

### Claim 9

A contact unit applied to a contact-type power supply apparatus including a first cylindrical body and a second cylindrical body configured to surround the first cylindrical body, to be disposed concentrically to the first cylindrical body, and to be rotatable around a central axis of the first cylindrical body, the contact unit comprising:
a contact body configured to face an annular body in an axial direction of the first cylindrical body, to surround the first cylindrical body, to be disposed concentrically to the first cylindrical body, to have a contact surface that is in contact with the inclined surface, and to being capable of receive an electric potential of the annular body by sliding with the annular body, and the annular body being configured to be in non-contact with the second cylindrical body, and to have an end surface being an inclined surface having a tapered shape; and
an annular support fixed to the second cylindrical body, being capable of surrounding the first cylindrical body, and supporting the contact body,
a relative distance between the support and the contact body in the axial direction being variable.
