# US 2021/0242267 A1 · Image sensor and method of fabricating the same

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- Number: US 2021/0242267 A1
- Document ID: US20210242267A1
- Status: Published application
- Kind: A1
- Application number: 17/007,332
- Filed: 2020-08-31
- Published: 2021-08-05
- Earliest claimed: 2020-01-30
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Sang-Hoon KIM; Kwan Hee LEE
- Web page: https://patentgrep.com/patent/US20210242267A1

## CPC

- H10F 39/811: {Interconnections}
- H10F 39/014: {of CMOS image sensors}
- H10F 39/018: {of hybrid image sensors}
- H10F 39/802: {Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes}
- H10F 39/8053: {Colour filters}
- H10F 39/8063: {Microlenses}
- H10F 39/807: {Pixel isolation structures}
- H10F 39/18: Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F 39/199: {Back-illuminated image sensors}
- H10F 39/809: {of hybrid image sensors}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

An image sensor with improved performance, and a method of fabricating the same are provided. The image sensor includes a sensor array region and a pad region, which is disposed outside the sensor array region, the image sensor comprising a first substrate including a first surface, upon which light is incident, and a second surface, which is opposite to the first surface, a first isolation film in the first substrate at the sensor array region, the first isolation film defining a plurality of unit pixels, a second substrate including a third surface, which faces the second surface of the first substrate, and a fourth surface, which is opposite to the third surface, a wiring structure between the second and third surfaces, the wiring structure including an interlayer insulating film and a wiring in the interlayer insulating film, a pad trench in the pad region, the pad trench exposing the wiring through the first substrate, a bonding terminal in the pad trench, the bonding terminal being connected to the wiring, and a second isolation film in the first substrate at the pad region, the second isolation film being adjacent to the pad trench, wherein widths of each of the first and second isolation films decrease in a direction from the second surface to the first surface.

## Claims

### Claim 1

An image sensor including a sensor array region and a pad region, which is disposed outside the sensor array region, the image sensor comprising:
a first substrate including a first surface, upon which light is incident, and a second surface, which is opposite to the first surface;
a first isolation film in the first substrate at the sensor array region, the first isolation film defining a plurality of unit pixels;
a second substrate including a third surface, which faces the second surface of the first substrate, and a fourth surface, which is opposite to the third surface;
a wiring structure between the second and third surfaces, the wiring structure including an interlayer insulating film and a wiring in the interlayer insulating film;
a pad trench in the pad region, the pad trench exposing the wiring through the first substrate;
a bonding terminal in the pad trench, the bonding terminal being connected to the wiring; and
a second isolation film in the first substrate at the pad region, the second isolation film being adjacent to the pad trench,
wherein widths of each of the first and second isolation films decrease in a direction from the second surface to the first surface.

### Claim 2 (depends on 1)

The image sensor of claim 1, wherein the first and second isolation films include respective oxide films, which extend along substrate trenches in the first substrate.

### Claim 3

(canceled)

### Claim 4 (depends on 2)

The image sensor of claim 2, wherein each of the first and second isolation films further includes a filling film, which fills the substrate trenches, on the respective oxide films.

### Claim 5 (depends on 4)

The image sensor of claim 4, wherein the filling film includes polysilicon.

### Claim 6 (depends on 1)

The image sensor of claim 1, wherein the first and second isolation films are formed at the same level.

### Claim 7 (depends on 1)

The image sensor of claim 1, wherein each of the first and second isolation films extends from the second surface of the first substrate to penetrate the first substrate.

### Claim 8 (depends on 7)

The image sensor of claim 7, wherein each of the first and second isolation films protrudes beyond the first surface.

### Claim 9 (depends on 1)

The image sensor of claim 1, wherein the first isolation film and the second isolation film are both disposed at the second surface, and widths of the first isolation film and the second isolation film at the second surface differ from each other.

### Claim 10 (depends on 1)

The image sensor of claim 1, further comprising:
a connecting region between the sensor array region and the pad region; and
a through via penetrating the first substrate at the connecting region.

### Claim 11 (depends on 10)

The image sensor of claim 10, further comprising:
a third isolation film adjacent to the through via, in the first substrate at the connecting region,
wherein a width of the third isolation film decreases in the direction from the second surface to the first surface.

### Claim 12

(canceled)

### Claim 13

An image sensor including a sensor array region, and a connecting region and a pad region, which are disposed outside the sensor array region, the image sensor comprising:
a first substrate including a first surface, upon which light is incident, and a second surface, which is opposite to the first surface;
a first isolation film in the first substrate at the sensor array region, the first isolation film defining a plurality of unit pixels;
a first wiring structure on the second surface of the first substrate, the first wiring structure including a first wiring in the connecting region;
a second substrate including a third surface, which faces the second surface of the first substrate, and a fourth surface, which is opposite to the third surface;
a second wiring structure on the third surface of the second substrate, the second wiring structure including a second wiring in the connecting region and a third wiring in the pad region;
a connecting structure in the connecting region, the connecting structure electrically connecting the first and second wirings;
a second isolation film in the first substrate at the connecting region, the second isolation film being disposed between the sensor array region and the connecting structure;
a bonding terminal in the pad region, the bonding terminal being connected to the third wiring; and
a third isolation film in the first substrate at the pad region, the third isolation film being disposed between the sensor array region and the bonding terminal,
wherein widths of each of the first, second, and third isolation films decrease in a direction from the second surface to the first surface.

### Claim 14 (depends on 13)

The image sensor of claim 13, wherein the connecting structure includes:
a first through via, which is connected to the first wiring through the first substrate;
a second through via, which is connected to the second wiring through the first substrate and the first wiring structure; and
a connecting wiring, which connects the first and second through vias, on the first surface of the first substrate.

### Claim 15 (depends on 13)

The image sensor of claim 13, wherein the connecting structure includes:
a first pillar, which extends from a boundary between the first and second wiring structures to be connected to the first wiring;
and a second pillar, which extends from the boundary between the first and second wiring structures to connect the first pillar and the second wiring.

### Claim 16 (depends on 13)

The image sensor of claim 13, wherein the second wiring structure includes a plurality of wirings, and
the second and third wirings are uppermost wirings among the plurality of wirings.

### Claim 17 (depends on 13)

The image sensor of claim 13, further comprising:
an edge region adjacent to edges of the image sensor; and
a fourth isolation film in the first substrate at the edge region,
wherein a width of the fourth isolation film decreases in the direction from the second surface to the first surface.

### Claim 18 (depends on 17)

The image sensor of claim 17, further comprising:
an edge trench adjacent to the fourth isolation film in the first substrate at the edge region, the edge trench exposing the first wiring structure.

### Claim 19

An image sensor including a sensor array region and a pad region, which is disposed outside the sensor array region, the image sensor comprising:
a first substrate including a first surface, upon which light is incident, and a second surface, which is opposite to the first surface;
a plurality of photoelectric conversion layers in the first substrate at the sensor array region;
a first isolation film in the first substrate at the sensor array region, the first isolation film separating the photoelectric conversion layers from one another;
a second substrate including a third surface, which faces the second surface of the first substrate, and a fourth surface, which is opposite to the third surface;
a wiring structure between the second and third surfaces, the wiring structure including an interlayer insulating film and a wiring in the interlayer insulating film;
a pad trench in the pad region, the pad trench exposing the wiring through the first substrate;
a bonding terminal in the pad trench, the bonding terminal including a ball portion connected to the wiring; and
a second isolation film in the first substrate at the pad region, the second isolation film being disposed between the sensor array region and the bonding terminal,
wherein:
widths of each of the first and second isolation films decrease in a direction from the second surface to the first surface,
the first isolation film includes a first oxide film, which extends along a first substrate trench in the first substrate, and
the second isolation film includes a second oxide film, which extends along a second substrate trench in the first substrate.

### Claim 20 (depends on 19)

The image sensor of claim 19, further comprising:
color filters disposed on the first surface of the first substrate at the sensor array region; and
respective microlenses on the color filters.

### Claim 21 (depends on 19)

The image sensor of claim 19, wherein:
the first isolation film further includes a first filling film on the first oxide film, such that the first filling film and first oxide film fill the first substrate trench, and
the second isolation film further includes a second filling film on the second oxide film, such that the second filling film and second oxide film fill the second substrate trench.

### Claim 22

(canceled)

### Claim 23 (depends on 19)

The image sensor of claim 19, wherein each of the first and second oxide films has a thickness within a range from 10 nm to 100 nm.

### Claim at position 24

24-26. (canceled)