# US 2021/0242258 A1 · Image sensing device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0242258 A1 - Document ID: US20210242258A1 - Status: Published application - Kind: A1 - Application number: 16/941,049 - Filed: 2020-07-28 - Published: 2021-08-05 - Earliest claimed: 2020-02-04 - Assignees: SK hynix Inc. - Applicants: SK hynix Inc. - Inventors: Min Su Cho - Web page: https://patentgrep.com/patent/US20210242258A1 ## CPC - H10F 39/803: {Pixels having integrated switching, control, storage or amplification elements} - H10F 39/8053: {Colour filters} - H10F 39/806: {Optical elements or arrangements associated with the image sensors} - H10F 39/8063: {Microlenses} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract An image sensing device is disclosed. The image sensing device includes a pixel array including a plurality of unit pixels, each of which is configured to generate a pixel signal in response to incident light. The pixel array includes a substrate layer including a plurality of photoelectric conversion elements configured to convert the incident light into an electric signal, a plurality of microlenses formed over the substrate layer to respectively correspond to the photoelectric conversion elements, and configured to converge the incident light into the corresponding photoelectric conversion elements, a plurality of color filters disposed between the plurality of photoelectric conversion elements and the plurality of microlenses and configured to transmit light at predetermined wavelengths to corresponding photoelectric conversion elements, and one or more grid structures disposed over the substrate layer at intervals to separate the microlenses and the color filters from adjacent microlenses and the color filter. The grid structures have different heights at different locations in the pixel array such that one or more of the grid structure include a top portion protruding from a top surface of an abutting microlens. ## Claims ### Claim 1 An image sensing device comprising: a pixel array including a plurality of unit pixels, each of which is configured to generate a pixel signal in response to incident light; wherein the pixel array includes: a substrate layer including a plurality of photoelectric conversion elements configured to convert the incident light into an electric signal; a plurality of microlenses formed over the substrate layer to respectively correspond to the photoelectric conversion elements, and configured to converge the incident light into the corresponding photoelectric conversion elements; a plurality of color filters disposed between the plurality of photoelectric conversion elements and the plurality of microlenses and configured to transmit light at predetermined wavelengths to corresponding photoelectric conversion elements; and one or more grid structures disposed over the substrate layer at intervals to separate the microlenses and the color filters from adjacent microlenses and the color filters, wherein the grid structures have different heights at different locations in the pixel array such that one or more of the grid structures include a top portion protruding from a top surface of an abutting microlens. ### Claim 2 (depends on 1) The image sensing device according to claim 1, wherein the heights of the grid structures are shorter at a center portion of the pixel array than at an edge portion of the pixel array and gradually increase in height as approaching the edge portion of the pixel array. ### Claim 3 (depends on 1) The image sensing device according to claim 1, wherein the plurality of microlenses is formed to have substantially the same height. ### Claim 4 (depends on 1) The image sensing device according to claim 1, wherein the plurality of microlenses is formed to have different heights depending on their locations in the pixel array. ### Claim 5 (depends on 4) The image sensing device according to claim 4, wherein the plurality of microlenses is formed to have different heights depending on their locations in the pixel array such that the heights of the microlenses are shorter at a center portion of the pixel array than at an edge portion of the pixel array and gradually increase in height as approaching an edge portion of the pixel array. ### Claim 6 (depends on 1) The image sensing device according to claim 1, wherein the respective microlenses have substantially the same radius of curvature (RoC). ### Claim 7 (depends on 1) The image sensing device according to claim 1, wherein the grid structures include: an air layer; and a capping film formed to cover the air layer. ### Claim 8 (depends on 7) The image sensing device according to claim 7, wherein the grid structures are formed in a manner that some regions of the air layer protrude outward from a spacing between the microlenses. ### Claim 9 (depends on 7) The image sensing device according to claim 7, wherein the capping film is formed to extend to regions below the color filters. ### Claim 10 (depends on 1) The image sensing device according to claim 1, wherein the grid structures include: a metal layer disposed over the substrate layer; an air layer disposed over the metal layer; and a capping film formed to cover the air layer and the metal layer. ### Claim 11 (depends on 10) The image sensing device according to claim 10, further comprising: an insulation film formed to cover a top surface of the metal layer and side surfaces of the metal layer. ### Claim 12 (depends on 11) The image sensing device according to claim 11, wherein the insulation film is formed to extend to regions below the color filters. ### Claim 13 (depends on 10) The image sensing device according to claim 10, wherein the grid structures are formed in a manner that a portion of the air layer protrude from a top surface of abutting microlenses. ### Claim 14 An image sensing device comprising: a pixel array including a plurality of unit pixels, each of which is configured to generate a pixel signal corresponding to incident light; wherein the pixel array includes: a substrate layer including a plurality of photoelectric conversion elements configured to convert the incident light into an electric signal; one or more grid structures disposed at intervals over the substrate layer, and configured to have different heights at different locations in the pixel array; a plurality of color filters disposed in a spacing defined by the grid structures and configured to transmit light at predetermined wavelengths to corresponding photoelectric conversion elements; and a plurality of microlenses disposed over the color filters, wherein the plurality of microlenses is consecutively arranged and, as a whole, forms a curved shape that is thinner at a center portion of the pixel array and thicker at an edge portion of the pixel array. ### Claim 15 (depends on 14) The image sensing device according to claim 14, wherein heights of the grid structures are shorter at the center portion of the pixel array than the edge portion of the pixel array and gradually increase in height as approaching the edge portion of the pixel array. ### Claim 16 (depends on 14) The image sensing device according to claim 14, wherein the grid structures include: an air layer; and a capping film formed to cover the air layer. ### Claim 17 (depends on 16) The image sensing device according to claim 16, wherein the capping film is formed to extend to regions below the color filters. ### Claim 18 (depends on 14) The image sensing device according to claim 14, wherein the grid structures include: a metal layer disposed over the substrate layer; an air layer disposed over the metal layer; and a capping film formed to cover the air layer and the metal layer. ### Claim 19 (depends on 18) The image sensing device according to claim 18, further comprising: an insulation film formed to cover a top surface of the metal layer and side surfaces of the metal layer. ### Claim 20 (depends on 19) The image sensing device according to claim 19, wherein the insulation film is formed to extend to regions below the color filters.