# US 2021/0242062 A1 · Electrostatic chuck heater and manufacturing method therefor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0242062 A1 - Document ID: US20210242062A1 - Status: Published application - Kind: A1 - Application number: 16/770,006 - Filed: 2019-01-24 - Published: 2021-08-05 - Earliest claimed: 2018-02-28 - Assignees: MiCo Ceramics Ltd. - Applicants: Mico Ceramics Ltd. - Inventors: Chul Ho JUNG; Jin Young CHOI - Web page: https://patentgrep.com/patent/US20210242062A1 ## CPC - H10P 72/722: {Details of electrostatic chucks} - C23C 16/4581: {characterised by material of construction or surface finish of the means for supporting the substrate} - C23C 16/4586: {Elements in the interior of the support, e.g. electrodes, heating or cooling devices} - C23C 16/46: characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) - H01J 37/32724: {Temperature} - H10P 72/0432: {mainly by conduction} - H10P 72/155: {characterised by a material, a roughness, a coating or the like} - H01J 2237/3323: uniformity - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract The present invention relates to an electrostatic chuck heater and a manufacturing method therefor and, more particularly, to an electrostatic chuck heater comprising: a ground electrode; and an electrostatic chuck electrode spaced a predetermined distance apart from the outside of the ground electrode, wherein the heater can reduce the phenomenon of rising of a wafer edge and thus can significantly reduce the temperature deviation according to positions on a heating surface of an object, such as a wafer, so as to increase the temperature uniformity of the heating surface. ## Claims ### Claim 1 An electrostatic chuck heater comprising: a ground electrode 310; and an electrostatic chuck electrode 320 spaced a predetermined distance apart from an outer side of the ground electrode 310. ### Claim 2 (depends on 1) The electrostatic chuck heater of claim 1, wherein the ground electrode 310 and the electrostatic chuck electrode 320 are provided on the same plane. ### Claim 3 (depends on 1) The electrostatic chuck heater of claim 1, wherein the electrostatic chuck electrode 320 is any one of a sheet type and a mesh type. ### Claim 4 (depends on 1) The electrostatic chuck heater of claim 1, wherein the ground electrode 310 has a circular plate shape having a diameter of 285 mm, and the electrostatic chuck electrode 320 has a ring shape having an inner diameter of 290 mm and an outer diameter of 320 mm. ### Claim 5 (depends on 1) The electrostatic chuck heater of claim 1, wherein the electrostatic chuck electrode 320 has a thickness of 0.2 mm. ### Claim 6 (depends on 1) The electrostatic chuck heater of claim 1, further comprising: an electrostatic chuck connecting member 325 for supplying electric power to the electrostatic chuck electrode 320, wherein a material of the electrostatic chuck connecting member 325 is molybdenum (Mo). ### Claim 7 (depends on 6) The electrostatic chuck heater of claim 6, wherein the electrostatic chuck connecting member 325 is any one of a sheet type and a mesh type. ### Claim 8 A method of manufacturing an electrostatic chuck heater, the method comprising: forming a ceramic powder layer structure 700 in which a ceramic molded body 720, in which a ground electrode 310 and an electrostatic chuck electrode 320 are embedded, is interposed between a first ceramic powder layer 710 and a second ceramic powder layer 730; and sintering the ceramic powder layer structure 700, wherein the electrostatic chuck electrode 320 is spaced a predetermined distance apart from an outer side of the ground electrode 310. ### Claim 9 (depends on 8) The method of claim 8, wherein the ceramic powder layer structure 700 further comprises a heating element between the second ceramic powder layer 730 and a third ceramic powder layer 740. ### Claim 10 (depends on 8) The method of claim 8, wherein the forming of the ceramic molded body 720 comprises: processing a molded body; providing an electrostatic chuck connecting member 325; providing a ground rod connecting member and an electrostatic chuck rod connecting member; and providing the ground electrode 310 and the electrostatic chuck electrode 320. ### Claim 11 (depends on 10) The electrostatic chuck heater of claim 10, wherein the ground electrode 310 and the electrostatic chuck electrode are provided on the same plane. ### Claim 12 (depends on 10) The electrostatic chuck heater of claim 10, wherein the electrostatic chuck electrode 320 is any one of a sheet type and a mesh type. ### Claim 13 (depends on 10) The electrostatic chuck heater of claim 10, wherein the ground electrode 310 has a circular plate shape having a diameter of 285 mm, and the electrostatic chuck electrode 320 has a ring shape having an inner diameter of 290 mm and an outer diameter of 320 mm. ### Claim 14 (depends on 10) The electrostatic chuck heater of claim 10, wherein the electrostatic chuck electrode 320 has a thickness of 0.2 mm. ### Claim 15 (depends on 10) The electrostatic chuck heater of claim 10, wherein a material of the electrostatic chuck connecting member 325 is molybdenum (Mo). ### Claim 16 (depends on 10) The electrostatic chuck heater of claim 10, wherein the electrostatic chuck connecting member 325 is any one of a sheet type and a mesh type.