# US 2021/0242061 A1 · Processing apparatus

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- Number: US 2021/0242061 A1
- Document ID: US20210242061A1
- Status: Published application
- Kind: A1
- Application number: 17/152,873
- Filed: 2021-01-20
- Published: 2021-08-05
- Earliest claimed: 2020-02-04
- Assignees: Disco Corporation
- Applicants: Disco Corporation
- Inventors: Yoshimasa KOJIMA; Atsushi KUBO
- Web page: https://patentgrep.com/patent/US20210242061A1

## CPC

- H10P 72/53: {using optical controlling means}
- H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks
- B23K 26/032: {using optical means}
- B23K 26/0622: by shaping pulses
- B23K 26/0823: {Devices involving rotation of the workpiece}
- B23K 26/0853: {Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane}
- B23K 26/364: for making a groove or trench, e.g. for scribing a break initiation groove
- B23K 26/38: by boring or cutting
- B23K 26/402: involving non-metallic material, e.g. isolators
- H04N 5/2628: {Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation}
- H04N 7/18: Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
- H04N 23/90: Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums
- H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting}
- H10P 72/0436: {mainly by radiation}
- B23K 2101/40: Semiconductor devices
- B23K 2103/56: {being semiconducting}
- H04N 5/2624: {for obtaining an image which is composed of whole input images, e.g. splitscreen}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION

## Abstract

A processing apparatus includes a chuck table including a plate-shaped holding component having a predetermined region transparent from one surface to the other surface, a processing unit that processes a workpiece, a first imaging unit disposed over the chuck table to acquire a normal image of the back surface side, and a second imaging unit disposed under the chuck table to acquire a normal image of the front surface side, a display device, and a control part that executes image processing of the normal image of either the back or front surface side to cause the normal image subjected to the image processing to be displayed on the display device in the state of being inverted in a predetermined direction in order to allow the orientation of the normal image of the back surface side to correspond with the orientation of the normal image of the front surface side.

## Claims

### Claim 1

A processing apparatus comprising:
a chuck table that includes one surface and the other surface located on an opposite side of the one surface and includes a plate-shaped holding component having a predetermined region formed of a transparent material from the one surface to the other surface;
a processing unit that processes a workpiece having a predetermined pattern on a front surface side in a state in which the front surface side of the workpiece is held by the one surface of the chuck table and a back surface side of the workpiece is exposed upward;
a first imaging unit that has a first imaging element and that is disposed over the chuck table and acquires a normal image of the back surface side;
a second imaging unit that has a second imaging element and that is disposed under the chuck table and acquires a normal image of the front surface side in a region corresponding to a region imaged by the first imaging unit in a thickness direction of the workpiece;
a display device that displays at least one of an image of the back surface side acquired by the first imaging unit and an image of the front surface side acquired by the second imaging unit; and
a control part that has a storing device in which a program to execute image processing is stored and a processor that processes an image in accordance with the program, the control part executing the image processing of either the normal image of the back surface side or the normal image of the front surface side to cause the normal image subjected to the image processing to be displayed on the display device in a state of being inverted in a predetermined direction in order to allow orientation of the normal image of the back surface side to correspond with orientation of the normal image of the front surface side.

### Claim 2 (depends on 1)

The processing apparatus according to claim 1, wherein
the image of the front surface side is displayed on the display device together with the image of the back surface side.

### Claim 3 (depends on 1)

The processing apparatus according to claim 1, wherein
the processing unit is
a cutting unit having a spindle, wherein a cutting blade is configured to be mounted on one end of the spindle, or
a laser irradiation unit having a laser oscillator that generates a laser beam and a collecting lens that collects the laser beam emitted from the laser oscillator.

### Claim 4

A processing apparatus comprising:
a chuck table that includes one surface and the other surface located on an opposite side of the one surface and includes a plate-shaped holding component having a predetermined region formed of a transparent material from the one surface to the other surface;
a processing unit that processes a workpiece having a predetermined pattern on a front surface side in a state in which the front surface side of the workpiece is held by the one surface of the chuck table and a back surface side of the workpiece is exposed upward;
a first imaging unit that has a first imaging element and that is disposed over the chuck table and acquires a normal image of the back surface side;
a third imaging unit that has a third imaging element and that is disposed under the chuck table and acquires a mirror image of the front surface side in a region corresponding to a region imaged by the first imaging unit in a thickness direction of the workpiece; and
a display device that displays at least one of an image of the back surface side acquired by the first imaging unit and an image of the front surface side acquired by the third imaging unit.

### Claim 5 (depends on 4)

The processing apparatus according to claim 4, further comprising:
a control part having a storing device in which a program to execute image processing is stored and a processor that processes an image in accordance with the program, wherein
the control part executes the image processing of both the normal image of the back surface side and the mirror image of the front surface side to cause the normal and mirror images subjected to the image processing to be displayed on the display device in a state of being inverted in a predetermined direction in order to allow orientation of the normal image of the back surface side to correspond with orientation of the mirror image of the front surface side.

### Claim 6 (depends on 4)

The processing apparatus according to claim 4, wherein
the image of the front surface side is displayed on the display device together with the image of the back surface side.

### Claim 7 (depends on 4)

The processing apparatus according to claim 4, wherein
the processing unit is
a cutting unit having a spindle, wherein a cutting blade is configured to be mounted on one end of the spindle, or
a laser irradiation unit having a laser oscillator that generates a laser beam and a collecting lens that collects the laser beam emitted from the laser oscillator.

### Claim 8

A processing apparatus comprising:
a chuck table that includes one surface and the other surface located on an opposite side of the one surface and includes a plate-shaped holding component having a predetermined region formed of a transparent material from the one surface to the other surface;
a processing unit that processes a workpiece having a predetermined pattern on a front surface side in a state in which the front surface side of the workpiece is held by the one surface of the chuck table and a back surface side of the workpiece is exposed upward;
a fourth imaging unit that has a fourth imaging element and that is disposed over the chuck table and acquires a mirror image of the back surface side;
a second imaging unit that has a second imaging element and that is disposed under the chuck table and acquires a normal image of the front surface side in a region corresponding to a region imaged by the fourth imaging unit in a thickness direction of the workpiece; and
a display device that displays at least one of an image of the back surface side acquired by the fourth imaging unit and an image of the front surface side acquired by the second imaging unit.

### Claim 9 (depends on 8)

The processing apparatus according to claim 8, further comprising:
a control part having a storing device in which a program to execute image processing is stored and a processor that processes an image in accordance with the program, wherein
the control part executes the image processing of both the mirror image of the back surface side and the normal image of the front surface side to cause the mirror and normal images subjected to the image processing to be displayed on the display device in a state of being inverted in a predetermined direction in order to allow orientation of the mirror image of the back surface side to correspond with orientation of the normal image of the front surface side.

### Claim 10 (depends on 8)

The processing apparatus according to claim 8, wherein
the image of the front surface side is displayed on the display device together with the image of the back surface side.

### Claim 11 (depends on 8)

The processing apparatus according to claim 8, wherein
the processing unit is
a cutting unit having a spindle, wherein a cutting blade is configured to be mounted on one end of the spindle, or
a laser irradiation unit having a laser oscillator that generates a laser beam and a collecting lens that collects the laser beam emitted from the laser oscillator.

### Claim 12

A processing apparatus comprising:
a chuck table that includes one surface and the other surface located on an opposite side of the one surface and includes a plate-shaped holding component having a predetermined region formed of a transparent material from the one surface to the other surface;
a processing unit that processes a workpiece having a predetermined pattern on a front surface side in a state in which the front surface side of the workpiece is held by the one surface of the chuck table and a back surface side of the workpiece is exposed upward;
a fourth imaging unit that has a fourth imaging element and that is disposed over the chuck table and acquires a mirror image of the back surface side;
a third imaging unit that has a third imaging element and that is disposed under the chuck table and acquires a mirror image of the front surface side in a region corresponding to a region imaged by the fourth imaging unit in a thickness direction of the workpiece;
a display device that displays at least one of an image of the back surface side acquired by the fourth imaging unit and an image of the front surface side acquired by the third imaging unit; and
a control part that has a storing device in which a program to execute image processing is stored and a processor that processes an image in accordance with the program, the control part executing the image processing of either the mirror image of the back surface side or the mirror image of the front surface side to cause the mirror image subjected to the image processing to be displayed on the display device in a state of being inverted in a predetermined direction in order to allow orientation of the mirror image of the back surface side to correspond with orientation of the mirror image of the front surface side.

### Claim 13 (depends on 12)

The processing apparatus according to claim 12, wherein
the image of the front surface side is displayed on the display device together with the image of the back surface side.

### Claim 14 (depends on 12)

The processing apparatus according to claim 12, wherein
the processing unit is
a cutting unit having a spindle, wherein a cutting blade is configured to be mounted on one end of the spindle, or
a laser irradiation unit having a laser oscillator that generates a laser beam and a collecting lens that collects the laser beam emitted from the laser oscillator.