# US 2021/0242048 A1 · Ceramic heater

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- Number: US 2021/0242048 A1
- Document ID: US20210242048A1
- Status: Published application
- Kind: A1
- Application number: 17/302,080
- Filed: 2021-04-23
- Published: 2021-08-05
- Earliest claimed: 2019-01-25
- Assignees: NGK Insulators, Ltd.
- Applicants: Ngk Insulators, Ltd.
- Inventors: Masaki Ishikawa; Shuichiro Motoyama
- Web page: https://patentgrep.com/patent/US20210242048A1

## CPC

- H10P 72/0432: {mainly by conduction}
- H05B 1/0233: {for semiconductors manufacturing}
- H05B 3/22: non-flexible
- H05B 3/283: {the insulating material being an inorganic material, e.g. ceramic}
- H10P 72/72: using electrostatic chucks
- H10P 72/722: {Details of electrostatic chucks}
- H05B 2203/005: using multiple resistive elements or resistive zones isolated from each other
- H05B 2203/016: Heaters using particular connecting means
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL

## Abstract

A ceramic heater includes a ceramic plate. The ceramic plate has a wafer placement surface and has an inner-peripheral-side zone that has a circular shape and an outer-peripheral-side zone that has an annular shape. An inner-peripheral-side resistance heating element that has a two-dimensional shape is disposed in the inner-peripheral-side zone. An outer-peripheral-side is resistance heating element that has a coil shape is disposed in the outer-peripheral-side zone. A terminal of inner-peripheral-side resistance heating element and a terminal of the outer-peripheral-side resistance heating element are disposed in the inner-peripheral-side.

## Claims

### Claim 1

A ceramic heater comprising:
a ceramic plate that has a wafer placement surface and that has an inner-peripheral-side zone that has a circular shape and an outer-peripheral-side zone that has an annular shape;
an inner-peripheral-side resistance heating element that is disposed in the inner-peripheral-side zone and that has a two-dimensional shape; and
an outer-peripheral-side resistance heating element that is disposed in the outer-peripheral-side zone and that has a coil shape,
wherein a terminal of the inner-peripheral-side resistance heating element and a terminal of the outer-peripheral-side resistance heating element are disposed in the inner-peripheral-side zone.

### Claim 2 (depends on 1)

The ceramic heater according to claim 1,
wherein the inner-peripheral-side resistance heating element is wired over the entire inner-peripheral-side zone via a space between the terminals.

### Claim 3 (depends on 1)

The ceramic heater according to claim 1,
wherein an area of the inner-peripheral-side zone is smaller than an area of the outer-peripheral-side zone.

### Claim 4 (depends on 1)

The ceramic heater according to claim 1,
wherein the inner-peripheral-side resistance heating element and the outer-peripheral-side resistance heating element are disposed on the same plane parallel with the wafer placement surface in the ceramic plate.

### Claim 5 (depends on 1)

The ceramic heater according to claim 1,
wherein the inner-peripheral-side zone is a single zone, and
wherein the outer-peripheral-side zone is divided into two or more zones, and the outer-peripheral-side resistance heating element is separately wired for every zone.