# US 2021/0242045 A1 · Frame feeder

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- Number: US 2021/0242045 A1
- Document ID: US20210242045A1
- Status: Published application
- Kind: A1
- Application number: 16/650,378
- Filed: 2018-07-31
- Published: 2021-08-05
- Earliest claimed: 2017-08-01
- Assignees: Kabushiki Kaisha Shinkawa
- Applicants: Shinkawa Ltd.
- Inventors: Kazuaki NAGANO
- Web page: https://patentgrep.com/patent/US20210242045A1

## CPC

- H10P 72/0432: {mainly by conduction}
- F24H 3/04: the air being in direct contact with the heating medium, e.g. electric heating element
- H10P 72/0434: {mainly by convection}
- H10P 72/36: {using air tracks}
- H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks
- H10W 72/071: {Connecting or disconnecting}
- H10W 72/01365: {Thermally treating (reflowing H10W72/01357)}
- H10W 72/07141: {Means for applying energy, e.g. ovens or lasers}
- H10W 72/07173: {Means for moving chips, wafers or other parts, e.g. conveyor belts}
- H10W 72/07178: {Means for aligning}
- H10W 72/07311: {Treating the bonding area before connecting, e.g. by applying flux or cleaning}
- H10W 72/07331: {Connecting techniques}
- H10W 72/551: {Materials of bond wires}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- F24H: FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL (steam generation F22)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

The present invention includes: a heat plate for heating a lower side of a substrate sliding on an upper surface; and a heat block for heating the heat plate. The heat block includes an air heating flow path for heating air which flows in from a bottom surface side and causing the air to flow out to the heat plate side, the heat plate includes air holes for discharging the air heated by the air heating flow path from the upper surface, the heated air discharged from the air holes forms a heated air atmosphere above the heat plate, and the substrate is transported through the heat air atmosphere. Thereby, curved deformation of the substrate is suppressed.

## Claims

### Claim 1

A frame feeder for heating and transporting a substrate, comprising:
a heat plate for heating a lower side of the substrate sliding on an upper surface of the heat plate; and
a heat block which is laminated on a lower side of the heat plate and heats the heat plate,
wherein the heat block comprises an air heating flow path for heating air which flows in from a bottom surface side and causing the air to flow out to the heat plate side,
the heat plate comprises air holes for discharging the air heated by the air heating flow path of the heat block from the upper surface, and
the heated air discharged from the air holes forms a heated air atmosphere above the heat plate, and the substrate is transported through the heated air atmosphere,
a flow rate of the air flowing through the air heating flow path is a flow rate at which a temperature of the heated air discharged from the air holes is substantially the same as a temperature of the upper surface of the heat plate.

### Claim 2 (depends on 1)

The frame feeder according to claim 1, wherein
the air heating flow path of the heat block is a labyrinth flow path comprising at least one turn.

### Claim 3 (depends on 1)

The frame feeder according to claim 1, wherein
the heat plate is formed by a material having a thermal diffusivity of 1×10−5 to 8×10−5 (m2/sec).

### Claim 4

(canceled)

### Claim 5 (depends on 1)

The frame feeder according to claim 1, wherein
the upper surface of the heat plate is open to the atmosphere, and the air holes diffuse the heated air atmosphere to surroundings.

### Claim 6 (depends on 2)

The frame feeder according to claim 2, wherein
the upper surface of the heat plate is open to the atmosphere, and the air holes diffuse the heated air atmosphere to surroundings.

### Claim 7 (depends on 3)

The frame feeder according to claim 3, wherein
the upper surface of the heat plate is open to the atmosphere, and the air holes diffuse the heated air atmosphere to surroundings.

### Claim 8 (depends on 2)

The frame feeder according to claim 2, wherein
the heat plate is formed by a material having a thermal diffusivity of 1×10−5 to 8×10−5 (m2/sec).

### Claim 9 (depends on 2)

The frame feeder according to claim 2, wherein
a plurality of the air holes in the heat plate is arranged side by side in a direction intersecting a transport direction of the substrate.

### Claim 10 (depends on 9)

The frame feeder according to claim 9, wherein
the heat plate is formed by a material having a thermal diffusivity of 1×10−5 to 8×10−5 (m2/sec).