# US 2021/0240899 A1 · Addressing layout retargeting shortfalls

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- Number: US 2021/0240899 A1
- Document ID: US20210240899A1
- Status: Published application
- Kind: A1
- Application number: 16/779,179
- Filed: 2020-01-31
- Published: 2021-08-05
- Earliest claimed: 2020-01-31
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Dongbing Shao; Rasit Onur Topaloglu; Geng Han; Yuping Cui
- Web page: https://patentgrep.com/patent/US20210240899A1

## CPC

- G06F 30/392: Floor-planning or layout, e.g. partitioning or placement
- G06F 30/398: Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36)
- G06F 2119/18: Manufacturability analysis or optimisation for manufacturability
- Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

Aspects of the invention provide means for addressing layout retargeting shortfalls. Initially, an original design shape in the layout is allowed to be simulated by process simulation to form process simulation contours. A polygon is then fitted to the process simulation contours to form a fitted simulated shape. Subsequently, whether the fitted simulated shape differs from the original design shape is detected. The process simulation may reflect the changes to the layout that occur at a foundry as part of a retargeting process. Advantageously, addressing a layout for retargeting shortfalls in accordance with aspects of the invention is likely to result in manufactured semiconductor devices having higher yields and reliability than those produced from a like layout that is not addressed in this manner.

## Claims

### Claim 1

A method comprising the steps of:
allowing an original design shape in a layout to be simulated by process simulation to form process simulation contours;
fitting a polygon to the process simulation contours to form a fitted simulated shape;
comparing the fitted simulated shape and the original design shape; and
determining whether the fitted simulated shape violates a set of design rules in response to detecting that the fitted simulated shape differs from the original design shape.

### Claim 2 (depends on 1)

The method of claim 1, wherein the fitting step comprises generating a concave hull that characterizes the process simulation contours.

### Claim 3 (depends on 2)

The method of claim 2, wherein the fitting step comprises fitting a plurality of rectangles to the concave hull and merging the plurality of rectangles to form the polygon.

### Claim 4 (depends on 1)

The method of claim 1, wherein the comparing step comprises comparing the fitted simulated shape to the original design shape utilizing a NOT or an XOR Boolean operation.

### Claim 5

(canceled)

### Claim 6 (depends on 1)

The method of claim 1, wherein the determining step comprises determining at least one of width, length, spacing, density, enclosure, or area of the fitted simulated shape.

### Claim 7 (depends on 1)

The method of claim 1, further comprising the step of modifying the layout if the fitted simulated shape violates the set of design rules.

### Claim 8 (depends on 7)

The method of claim 7, wherein the modifying step comprises modifying at least one of size, shape, or position of the original design shape.

### Claim 9 (depends on 7)

The method of claim 7, further comprising the step of manufacturing a semiconductor device based on the modified layout.

### Claim 10 (depends on 1)

The method of claim 1, further comprising providing a system, wherein the system comprises distinct software modules, each of the distinct software modules being embodied on a computer readable storage medium, and wherein:
the distinct software modules comprise a polygon fitting module and a difference detection module;
the fitting step is carried out by the polygon fitting module executing on at least one hardware processor; and
the comparing step is carried out by the difference detection module executing on the at least one hardware processor.

### Claim 11

A computer program product comprising a computer readable storage medium having program instructions embodied therewith, the program instructions executable by a processor to cause the processor to:
allow an original design shape in the layout to be simulated by process simulation to form process simulation contours;
fit a polygon to the process simulation contours to form a fitted simulated shape;
compare the fitted simulated shape and the original design shape; and
determine whether the fitted simulated shape violates a set of design rules in response to detecting that the fitted simulated shape differs from the original design shape.

### Claim 12

An apparatus comprising:
a memory; and
at least one processor coupled to the memory and operative to perform the steps of:
allowing an original design shape in the layout to be simulated by process simulation to form process simulation contours;
fitting a polygon to the process simulation contours to form a fitted simulated shape;
comparing the fitted simulated shape and the original design shape; and
determining whether the fitted simulated shape violates a set of design rules in response to detecting that the fitted simulated shape differs from the original design shape.

### Claim 13 (depends on 12)

The apparatus of claim 12, wherein the fitting step comprises generating a concave hull that characterizes the process simulation contours.

### Claim 14 (depends on 13)

The apparatus of claim 13, wherein the fitting step comprises fitting a plurality of rectangles to the concave hull and merging the plurality of rectangles to form the polygon.

### Claim 15 (depends on 12)

The apparatus of claim 12, wherein the comparing step comprises comparing the fitted simulated shape to the original design shape utilizing a NOT or XOR Boolean operation.

### Claim 16

(canceled)

### Claim 17 (depends on 12)

The apparatus of claim 12, wherein the determining step comprises determining at least one of width, length, spacing, density, enclosure, or area of the fitted simulated shape.

### Claim 18 (depends on 12)

The apparatus of claim 12, wherein the at least one processor is further operative to perform the step of modifying the layout if the fitted simulated shape violates the set of design rules.

### Claim 19 (depends on 18)

The apparatus of claim 18, wherein the modifying step comprises modifying at least one of size, shape, or position of the original design shape.

### Claim 20 (depends on 12)

The apparatus of claim 12, further comprising a plurality of distinct software modules, each of the distinct software modules being embodied on a computer-readable storage medium, and wherein the distinct software modules comprise a polygon fitting module and a difference detection module, wherein:
the at least one processor is operative to perform the fitting step by executing the polygon fitting module; and
the at least one processor is operative to perform the comparing step by executing the difference detection module.

### Claim 21 (depends on 1)

The method of claim 1, further comprising simulating an original design shape in a layout by process simulation to form process simulation contours and modifying the layout to reflect retargeting code in accordance with a manufacturing process, the simulating and modifying performed prior to performing the fitting operation.
