# US 2021/0240087 A1 · Vertex-based opc for opening patterning

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- Number: US 2021/0240087 A1
- Document ID: US20210240087A1
- Status: Published application
- Kind: A1
- Application number: 17/144,975
- Filed: 2021-01-08
- Published: 2021-08-05
- Earliest claimed: 2020-01-31
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Co., Ltd.
- Inventors: Shinn-Sheng YU
- Web page: https://patentgrep.com/patent/US20210240087A1

## CPC

- G06F 30/398: Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36)
- G03F 1/36: Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
- G03F 7/70441: {Optical proximity correction [OPC]}
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A method of enhancing a layout pattern includes determining a target layout pattern comprising a disk shape pattern associated with an opening. The method includes defining a polygon having a plurality of vertices on the disk shape pattern. The plurality of vertices coincide with a boundary of the disk shape pattern and the polygon is an initial layout pattern of the opening. The method includes performing an iterative correction of the initial layout pattern. The iterative correction includes projecting the layout pattern of the opening onto a substrate, determining an error between the target layout pattern and the projected layout pattern, and adjusting the layout pattern by moving the vertices of the polygon to generate a next iteration of the layout pattern. The method includes continuing the adjusting, projecting, and determining until a criterion is satisfied and a final iteration of the layout pattern of the opening is generated.

## Claims

### Claim 1

A method comprising:
determining a target layout pattern comprising a disk shape pattern associated with an opening to be produced over a substrate;
defining a polygon having a plurality of vertices on the target layout pattern, wherein the plurality of vertices of the polygon coincide with a boundary of the disk shape pattern in the target layout pattern, and wherein the polygon is an initial layout pattern of the opening;
determining one or more other patterns of the target layout pattern; and
performing an iterative correction of the initial layout pattern until a criterion is satisfied, wherein the iterative correction comprises:
projecting, onto the substrate, the initial layout pattern of the opening as a first iteration of a layout pattern of the opening;
determining a first error between the target layout pattern of the opening and the projected first iteration of the layout pattern of the opening; and
first adjusting the initial layout pattern of the opening by moving one or more vertices of the polygon, based on the first error;
second adjusting the initial layout pattern of the opening by further moving one or more vertices of the polygon based on the one or more other patterns to generate the next iteration of the layout pattern of the opening; and
continue the projecting, the determining, the first adjusting, and the second adjusting until the criterion is satisfied and a final iteration of the layout pattern of the opening is generated.

### Claim 2 (depends on 1)

The method of claim 1, wherein the adjusting is performed based on the first error, and wherein the adjusting the initial layout pattern of the opening comprises:
moving a first group of one or more vertices of the plurality of vertices inward from the boundary of the disk shape pattern; and
moving a second group of one or more vertices of the plurality of vertices outward from the boundary of the disk shape pattern.

### Claim 3 (depends on 1)

The method of claim 1, wherein the determining the disk shape pattern associated with the opening comprises:
receiving an initial target layout pattern comprising a substantially square shape associated with the opening; and
determining a largest circle fitting inside the substantially square shape as the disk shape pattern associated with the opening,
the method further comprising:
producing a photo mask by disposing the final iteration of the layout pattern of the opening on a mask blank.

### Claim 4 (depends on 1)

The method of claim 1, wherein the polygon is a regular polygon having five or more vertices, and wherein the criterion is satisfied when the first error is below a first threshold.

### Claim 5 (depends on 1)

The method of claim 1, wherein the first error between the target layout pattern of the opening and the projected first iteration of the layout pattern of the opening is defined as a distance between the boundary of the disk shape pattern of the target layout pattern and a boundary of the projected first iteration of the layout pattern of the opening, and wherein the projecting is a simulated projection.

### Claim 6 (depends on 1)

The method of claim 1, wherein the adjusting the initial layout pattern of the opening comprises:
in each second adjusting, modifying the initial layout pattern of the opening by further moving inward one or more vertices of the polygon based on a different pattern of the one or more other patterns.

### Claim 7 (depends on 1)

The method of claim 1, further comprising:
prior to performing the iterative correction, determining one or more sub-resolution assist features by performing:
acquiring a point spread function (PSF) of an optical imaging system of a lithography system and determining a full width at half maximum (FWHM) of the PSF;
shrinking the polygon by moving edges of the polygon inward along respective normal directions of the edges by a distance of FWHM/2;
replacing each sharp corner of the shrunk polygon by a rounded corner with a radius of curvature of FWHM/2; and
performing a convolution of the rounded shrunk polygon and the PSF to obtain a map, wherein in the map, assign regions with positive values to mask state 1 and regions with negative values to mask state 2.

### Claim 8 (depends on 7)

The method of claim 7, wherein in a binary mask when a positive-tone resist is used, the regions assigned to mask state 1 are set to clear and the regions assigned to mask state 2 are set to dark, and wherein in the binary mask when a negative-tone resist is used, the regions assigned to mask state 1 are set to dark and the regions assigned to mask state 2 are set to clear.

### Claim 9 (depends on 7)

The method of claim 7, wherein in a phase-shift mask when a positive-tone resist is used, the regions assigned to mask state 1 are set to clear with zero phase shift and the regions assigned to mask state 2 are set to clear with 180 degrees phase shift, and wherein in the phase-shift mask when a negative-tone resist is used, the regions assigned to mask state 1 are set to clear with 180 degrees phase shift and the regions assigned to mask state 2 are set to clear with zero phase shift.

### Claim 10 (depends on 7)

The method of claim 7, wherein the disk shape pattern is included in the mask state 1.

### Claim 11 (depends on 7)

The method of claim 7, wherein acquiring the PSF of the optical imaging system of the lithography system comprises:
dividing the layout pattern into a plurality of non-overlapping pixels;
first determining an intensity at origin (0,0) of the projected layout pattern on a wafer from one mask pixel located at origin (0,0), wherein denote the intensity by I(0,0);
second determining the intensity at origin (0,0) of the projected layout pattern on the wafer for two mask pixels, one located at origin (0,0) and another one at a point (x1,y1) and denote by J(x1, y1);
third determining a difference between J(x1, y1) and I(0,0) and an intensity difference and denote by I(x1, y1); and
generating a map by repeating the first, the second, and the third determining for other points and assigning the intensity differences to the other points and denoting the map as the point spread function (PSF).

### Claim 12

A method comprising:
receiving a target layout pattern associated with an opening to be produced on a substrate;
determining a regular polygon having a plurality of vertices inside the target layout pattern, wherein the vertices are inside or on a perimeter of the target layout pattern, and wherein the regular polygon is an initial layout pattern of the opening;
performing an iterative correction of the initial layout pattern, the iterative correction comprising:
projecting, onto the substrate, the initial layout pattern as a first iteration of a layout pattern of the opening;
determining a first error between the target layout pattern of the opening and the projected first iteration of the layout pattern of the opening; and
adjusting the initial layout pattern of the opening by moving the vertices away from an initial location of the vertices to generate a next iteration of the layout pattern of the opening; and
continuing the adjusting, the projecting, and the determining until a criterion is satisfied and a final iteration of the layout pattern of the opening is generated, wherein substantially circularly symmetric illumination is used for the projecting.

### Claim 13 (depends on 12)

The method of claim 12, wherein the adjusting the initial layout pattern of the opening comprises:
moving a first group of one or more vertices of the plurality of vertices inward from the perimeter of the target layout pattern; and
moving a second group of one or more vertices of the plurality of vertices outward from the perimeter of the target layout pattern.

### Claim 14 (depends on 12)

The method of claim 12, wherein the first error between the target layout pattern of the opening and the projected first iteration of the layout pattern of the opening is defined as a distance between the perimeter of the target layout pattern and a boundary of the projected first iteration of the layout pattern of the opening, and wherein the criterion is satisfied when the first error is below a first threshold.

### Claim 15

A layout pattern enhancement system, comprising:
a main controller;
a mask enhancer coupled to the main controller;
a mask projector coupled to the main controller;
an analyzer module coupled to the main controller, wherein the analyzer module is configured to receive a target layout pattern to be produced on a substrate, wherein the analyzer module is configured to receive a command from the main controller to parse the target layout pattern to determine a first sub-pattern of the target layout pattern comprising a rectangular shape having one or two substantially line-end shapes at one or both ends of the rectangular shape, and wherein the analyzer module is configured to fit one or two arc shapes inside the rectangular shape to the one or two substantially line-end shapes and replace the one or two substantially line-end shapes of the first sub-pattern of the target layout pattern with the one or two arc shapes;
the mask enhancer is coupled to the analyzer module through the main controller and is configured to receive the first sub-pattern from the analyzer module and define a portion of a regular polygon having a plurality of vertices on a first arc shape of the one or two arc shapes at a first end of the rectangular shape, wherein the plurality of vertices of the portion of the regular polygon coincide with a boundary of the first arc shape at the first end of the rectangular shape of the first sub-pattern of the target layout pattern, and wherein the portion of the regular polygon is an initial layout pattern of the first end of the rectangular shape of the first sub-pattern, wherein:
the mask projector is configured to project, onto the substrate, the initial layout pattern as a first iteration of a layout pattern of the first end of the rectangular shape of the first sub-pattern;
the analyzer module is further configured to determine a first error between the target layout pattern of the first end of the rectangular shape of the first sub-pattern and the projected first iteration of the first end of the rectangular shape of the first sub-pattern; and
the mask enhancer is further configured to adjust the initial layout pattern by moving the vertices away from the boundary of the first arc shape to generate a next iteration of the layout pattern of the first end of the rectangular shape of the first sub-pattern; and
the main controller is further configured to continue the adjusting, the projecting, and the determining until the first error is below an error threshold and a final iteration of the layout pattern of the first end of the rectangular shape of the first sub-pattern is generated.

### Claim 16 (depends on 15)

The system of claim 15, wherein the first sub-pattern of the target layout pattern is a connection line, and wherein the mask enhancer is further configured to receive a command from the main controller to perform optical proximity correction of edges of the rectangular shape of the first sub-pattern.

### Claim 17 (depends on 15)

The system of claim 15, wherein the one or two arc shapes are semicircles, and wherein layout pattern enhancement is performed at both ends of the rectangular shape of the first sub-pattern.

### Claim 18 (depends on 15)

The system of claim 15, further comprising:
a mask projection system configured for facilitating a production of the first sub-pattern on a photo mask.

### Claim 19 (depends on 15)

The system of claim 15, wherein the adjusting the initial layout pattern comprises:
moving a first group of one or more vertices of the plurality of vertices inward from the boundary the first arc shape; and
moving a second group of one or more vertices of the plurality of vertices outward from the boundary the first arc shape.

### Claim 20 (depends on 15)

The system of claim 15, wherein the first error between the target layout pattern of the first end of the rectangular shape of the first sub-pattern and the projected first iteration of the first end of the rectangular shape of the first sub-pattern is defined as a distance between the boundary of the first arc shape of the first sub-pattern and a boundary of the projected first iteration of the first end of the rectangular shape of the first sub-pattern, and wherein the projecting is a simulated projection.