# US 2021/0240076 A1 · High-density neural probes having various forms and methods for manufacturing the same

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- Number: US 2021/0240076 A1
- Document ID: US20210240076A1
- Status: Published application
- Kind: A1
- Application number: 16/923,965
- Filed: 2020-07-08
- Published: 2021-08-05
- Earliest claimed: 2020-01-31
- Assignees: Korea Institute of Science and Technology
- Applicants: Korea Institute of Science and Technology
- Inventors: MaeSoon IM; Byung Chul LEE; Young Jun YOON; Jin Soo PARK; Seung Min KWAK
- Web page: https://patentgrep.com/patent/US20210240076A1

## CPC

- A61N 1/0531: {Brain cortex electrodes}
- G03F 7/0041: {providing an etching agent upon exposure (G03F7/075 takes precedence; photolytic halogen compounds G03F7/0295)}
- A61B 5/24: Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B 5/262: Needle electrodes
- A61N 1/0529: {Electrodes for brain stimulation}
- A61B 5/4064: {Evaluating the brain (for intracranial pressure A61B5/031; for cerebral blood gases A61B5/14553; using EEG A61B5/369)}
- A61B 2562/125: characterised by the manufacture of electrodes
- A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)

## Abstract

Disclosed are a method for manufacturing a high-density neural probe including needles having various forms and a neural probe manufactured thereby. The method, in which only a photolithography process and an etching process are used, simplifies a manufacturing process of the neural probe, minimizes changes in the characteristics of the neural probe depending on process equipment or conditions, and may thus ensure a high yield, thereby being advantageous in terms of commercialization. In addition, various forms of needles may be manufactured depending on the shape of patterns included in a mask, the height of the needles may be controlled by adjusting the size of the patterns and the gap between the patterns, and thereby, a neural probe having a plurality of needles having different heights may be manufactured.

## Claims

### Claim 1

A method for manufacturing a neural probe, the method comprising:
preparing a mask comprising a plurality of patterns;
coating a base material with a photoresist;
patterning the base material coated with the photoresist through a photolithography process using the mask;
forming trenches by performing anisotropic etching of the patterned base material; and
performing isotropic etching of the formed trenches.

### Claim 2 (depends on 1)

The method of claim 1, wherein the performing the isotropic etching comprises:
removing the photoresist from one surface of the base material provided with the trenches formed therein;
bonding another base material coated with a photoresist to a remaining surface of the base material provided with the trenches formed therein; and
performing the isotropic etching of the trenches formed in the one surface of the base material.

### Claim 3 (depends on 1)

The method of claim 1, wherein the patterns have at least one shape selected from the group consisting of polygonal shapes and circular shapes.

### Claim 4 (depends on 3)

The method of claim 3, wherein the polygonal shapes comprise at least one selected from the group consisting of a triangle, a diamond, a pentagon, a trapezoid and a cross.

### Claim 5 (depends on 3)

The method of claim 3, wherein the circular shapes comprise at least one selected from the group consisting of a circle and an oval.

### Claim 6 (depends on 3)

The method of claim 3, wherein the patterns are arranged so as to be spaced apart from each other by a constant gap.

### Claim 7 (depends on 6)

The method of claim 6, wherein the gap between the patterns is within a range of 1-1,000 μm.

### Claim 8 (depends on 3)

The method of claim 3, wherein sizes of the patterns are within a range of 1-1,000 μm.

### Claim 9 (depends on 1)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 1.

### Claim 10 (depends on 9)

The neural probe of claim 9, wherein heights of the needles are within a range of 1-5,000 μm.

### Claim 11 (depends on 9)

The neural probe of claim 9, wherein sizes of the needles are within a range of 1-1,000 μm.

### Claim 12 (depends on 2)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 2.

### Claim 13 (depends on 3)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 3.

### Claim 14 (depends on 4)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 4.

### Claim 15 (depends on 5)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 5.

### Claim 16 (depends on 6)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 6.

### Claim 17 (depends on 7)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 7.

### Claim 18 (depends on 8)

A neural probe comprising a plurality of needles having various forms, manufactured by the method of claim 8.