# US 2021/0240072 A1 · Pellicle frame body for flat panel display, and method for manufacturing same

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- Number: US 2021/0240072 A1
- Document ID: US20210240072A1
- Status: Published application
- Kind: A1
- Application number: 17/269,160
- Filed: 2019-08-23
- Published: 2021-08-05
- Earliest claimed: 2018-08-28
- Assignees: Nippon Light Metal Company, Ltd.
- Applicants: Nippon Light Metal Company, Ltd.
- Inventors: Naoto KOMURA; Koichi NAKANO; Akira IIZUKA
- Web page: https://patentgrep.com/patent/US20210240072A1

## CPC

- G03F 1/64: characterised by the frames, e.g. structure or material, including bonding means therefor
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

The present invention provides an FPD pellicle frame body in which external color is controlled so as to make it easy to prevent scattering of exposure light, to perform the foreign object non-adhesion inspection before use, and the like, and a method for manufacturing the frame body efficiently. The FPD pellicle frame body of the present invention comprises: a stainless-steel member having a transparent oxide coating, and a film thickness of the transparent oxide coating being 420 nm to 700 nm. It is preferable that a brightness index L* due to the interference color of the reflected lights from the surface of the transparent oxide coating and the surface of the stainless-steel member is 33 or less.

## Claims

### Claim 1

A pellicle frame body for flat panel display (FPD), which comprises:
a stainless-steel member having a transparent oxide coating, and
a film thickness of the transparent oxide coating being 420 nm to 700 nm.

### Claim 2 (depends on 1)

The FPD pellicle frame body according to claim 1, wherein a brightness index L* due to the interference color of the reflected lights from the surface of the transparent oxide coating and the surface of the stainless-steel member is 33 or less.

### Claim 3 (depends on 1)

The FPD pellicle frame body according to claim 1, wherein the interference color is black, gray or magenta.

### Claim 4 (depends on 1)

The FPD pellicle frame body according to claim 1, wherein the stainless-steel member is an austenitic stainless-steel member.

### Claim 5 (depends on 1)

The FPD pellicle frame body according to claim 1, wherein the stainless-steel member is a martensitic stainless-steel member.

### Claim 6 (depends on 1)

The FPD pellicle frame body according to claim 1, wherein the length of the short side is 300 mm or more and the length of the long side is 400 mm or more.

### Claim 7

A method for manufacturing an FPD pellicle frame body, which comprises:
a first step for obtaining a frame body comprising a stainless-steel member, and
a second step for forming a transparent oxide coating by immersing the frame body in a mixed solution containing chromic acid and sulfuric acid.

### Claim 8 (depends on 7)

The method for manufacturing an FPD pellicle frame body according to claim 7, wherein a film thickness of the transparent oxide coating is 420 nm to 700 nm.

### Claim 9 (depends on 7)

The method for manufacturing an FPD pellicle frame body according to claim 7, wherein the stainless-steel member is of an austenitic stainless-steel or a martensitic stainless-steel.

### Claim 10 (depends on 7)

The method for manufacturing an FPD pellicle frame body according to claim 7, wherein the frame body is formed by a solid-phase welding of the stainless-steel member.

### Claim 11 (depends on 7)

The method for manufacturing an FPD pellicle frame according to claim 7, wherein friction stir welding or linear friction welding is used for the solid-phase welding.