Apparatus of supporting debonding and method for debonding using the same
AssigneeCorning Incorporated
InventorsBokyung Kong, Kyungwook Park
Life of this patent
Estimating the term…
Abstract
A debonding support device includes a suction plate including a support region for supporting a glass assembly, the support region including at least two suction regions applying different suction forces per unit area, the suction regions including a debonding initiation portion suction region for sucking a debonding initiation portion at which debonding of the glass assembly is to be initiated, the debonding initiation portion suction region applying the strongest of the different suction forces per unit area; a vacuum pump connected to the suction plate to provide a vacuum pressure for the suction plate, and a controller.
Claims17
A debonding support device for supporting a process of debonding a sheet of carrier glass and a sheet of ultrathin glass bonded to each other to form a single glass assembly, the debonding support device comprising:
- a suction plate comprising a support region for supporting the glass assembly, the support region comprising at least two suction regions applying different suction forces per unit area, the at least two suction regions comprising a debonding initiation portion suction region for sucking a debonding initiation portion of the glass assembly at which debonding of the glass assembly is to be initiated, the debonding initiation portion suction region applying the strongest of the different suction forces per unit area;
- a vacuum pump connected to the suction plate to provide a vacuum pressure for the suction plate, and
- a controller configured to control the vacuum pump to adjust the vacuum pressure.
Dependencies are inferred from the claim text.