Method for Manufacturing a Multilayer Radiation Window and a Multilayer Radiation Window

Abstract

The invention relates to a method for manufacturing a multilayer radiation window for an X-ray measurement apparatus. The method comprises: producing a gas diffusion stop layer made of silicon nitride on a polished surface of a carrier; producing at least one combined layer on an opposite side of said gas diffusion stop layer than said carrier; attaching the combined structure comprising said carrier, said gas diffusion stop layer, said at least one combined layer to a region around an opening in a support structure with the at least one combined layer facing said support structure; and etching away said carrier. The at least one combined layer comprises: a light attenuation layer made of aluminium, and a strengthening layer. The invention relates also a radiation window manufactured with the method.

Dependencies are inferred from the claim text.