Two-dimensional conformal optically-fed phased array and methods of manufacturing the same
AssigneePhase Sensitive Innovations, Inc.
InventorsShouyuan Shi, Dennis Prather, Peng Yao, Janusz MURAKOWSKI
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AssigneePhase Sensitive Innovations, Inc.
InventorsShouyuan Shi, Dennis Prather, Peng Yao, Janusz MURAKOWSKI
Estimating the term…
This disclosure is directed to two-dimensional conformal optically-fed phased arrays and methods for manufacturing the same. The method includes providing a wafer substrate, depositing a first cladding layer on the wafer substrate, and depositing a core layer on the first cladding layer. The method further includes photolithographically patterning the core layer to provide a plurality of optical waveguide cores, and depositing a second cladding layer on the core layer to cover the plurality of optical waveguide cores to provide a plurality of optical waveguides. In addition, the method includes forming a plurality of antennas on the second cladding layer, each antenna of the plurality of antennas located near a termination of a corresponding optical waveguide of the plurality of optical waveguides, and providing a plurality of photodiodes on the second cladding layer, each photodiode of the plurality of photodiodes connected to a corresponding antenna.
-15. (canceled)
An antenna array system, comprising:
A method of manufacturing a radio frequency (RF) antenna module, comprising:
An antenna array system, comprising:
-47. (canceled)
Dependencies are inferred from the claim text.