Film forming apparatus
AssigneeToshiba Mitsubishi-Electric Industrial Systems Corporation
InventorsTakahiro HIRAMATSU, Hiroyuki ORITA, Nobuyoshi NAMITO, Yusuke IWAO
Life of this patent
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Abstract
Inside a heating space of a heating chamber, a first heating treatment of moving a substrate along a substrate moving direction is performed by a first conveyor. After that, first conveyance processing of moving the substrate along a conveying direction is performed by a second conveyor. At this time, source mist is sprayed on the substrate by first thin film forming nozzles. Subsequently, second heating treatment is performed by a third conveyor. After that, second conveyance processing is performed by a fourth conveyor. At this time, source mist is sprayed on the substrate by second thin film forming nozzles.
Claims9
A film forming apparatus comprising:
- first and second heating chambers including first and second heating spaces;
- first and second heating moving mechanisms provided in said first and second heating spaces, said first heating moving mechanism performing first heating treatment by moving a substrate in a first direction inside said first heating space, and said second heating moving mechanism performing second heating treatment by moving said substrate in a second direction inside said second heating space;
- a conveyance moving mechanism configured to perform conveyance processing of moving said substrate along a conveying direction, to thereby cause the substrate to pass through a film forming path outside said first and second heating chambers, and convey said substrate between the first and second heating chambers;
- and
- a mist spraying mechanism configured to perform mist spraying treatment of spraying source mist toward said substrate passing through said film forming path, the source mist being obtained by atomizing a source solution, wherein
- after at least one heating treatment of said first and second heating treatments is performed, a thin film is formed on said substrate by performing said mist spraying treatment with said mist spraying mechanism.
Dependencies are inferred from the claim text.