Systems and methods for stabilizing reaction chamber pressure

A method, comprising:

• flowing a first gas from a first gas source to a reaction chamber such that the reaction chamber comprises a reaction chamber desired pressure level;
• flowing a second gas from a second gas source to an exhaust line downstream of the reaction chamber via a vent line while the flowing the first the first gas from the first gas source to the reaction chamber occurs, wherein the vent line is in fluid communication with the second gas source and the exhaust line and bypasses the reaction chamber;
• ceasing the flow of the first gas to the reaction chamber;
• at least one of decreasing or ceasing the flow of the second gas to the exhaust line;
• flowing the second gas to the reaction chamber in response to the at least one of decreasing or ceasing the flow of the second gas to the exhaust line such that the reaction chamber maintains the reaction chamber desired pressure level;
• monitoring, via a pressure monitor coupled to the vent line, a vent line pressure of the vent line;
• and
• adjusting a vent line conductance control valve coupled to the vent line based on the vent line pressure detected by the pressure monitor.

A method, comprising:

• flowing a first gas from a first gas source to a reaction chamber such that the reaction chamber comprises a reaction chamber desired pressure level;
• flowing a second gas from a second gas source to an exhaust line downstream of the reaction chamber via a vent line while the flowing the first the first gas from the first gas source to the reaction chamber occurs, wherein the vent line is in fluid communication with the second gas source and the exhaust line and bypasses the reaction chamber;
• ceasing the flow of the first gas to the reaction chamber;
• at least one of decreasing or ceasing the flow of the second gas to the exhaust line;
• flowing the first gas to the exhaust line via the vent line in response to the ceasing the flow of the first gas to the reaction chamber, wherein the vent line is in fluid communication with the first gas source;
• flowing the second gas to the reaction chamber in response to the at least one of decreasing or ceasing the flowing the second gas to the exhaust line such that the reaction chamber maintains the reaction chamber desired pressure level;
• monitoring, via a pressure monitor coupled to the vent line, a vent line pressure;
• and
• adjusting a vent line conductance control valve coupled to the vent line based on the vent line pressure detected by the pressure monitor.