Substrate with water-and-oil repellent layer, vapor deposition material, and method for producing substrate with water-and-oil repellent layer

A deposition material to be used for forming an undercoat layer of a water/oil repellent layer comprising a condensate of a fluorinated compound having a reactive silyl group, wherein the deposition material contains an oxide of silicon and at least one element selected from the group consisting of titanium, zirconium and aluminum, and the ratio of the total molar concentration of titanium, zirconium and aluminum to the molar concentration of silicon is from 0.2 to 4.

A method for producing a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil-repellent layer in this order,

• which comprises forming on the substrate the undercoat layer containing an oxide containing silicon and at least one element selected from the group consisting of titanium, zirconium and aluminum, the ratio of the total molar concentration of titanium, zirconium and aluminum to the molar concentration of silicon being from 0.03 to 0.7, by wet coating method using a coating fluid containing a compound containing silicon, at least one compound selected from the group consisting of a compound containing titanium, a compound containing zirconium and a compound containing aluminum, and a liquid medium, and
• forming on the undercoat layer the water/oil repellent layer comprising a condensate of a fluorinated compound having a reactive silyl group.