Substrate with water repellent oil repellent layer, vapor deposition material, and method for producing substrate with water repellent oil repellent layer

A deposition material comprising an oxide containing silicon and at least one element of boron and phosphorus,

• wherein the ratio of the total molar concentration of boron and phosphorus to the molar concentration of silicon is from 0.003 to 9.

A method for producing a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil-repellent layer in this order,

• which comprises forming on the substrate the undercoat layer containing an oxide containing silicon and at least one element of boron and phosphorus, the ratio of the total molar concentration of boron and phosphorus to the molar concentration of silicon being from 0.003 to 9, by wet coating method using a coating fluid containing a compound containing silicon, at least one of a compound containing boron and a compound containing phosphorus, and a liquid medium, and
• forming on the undercoat layer the water/oil repellent layer comprising a condensate of a fluorinated compound having a reactive silyl group.