Resin composition for forming phase-separated structure, method for producing structure including phase-separated structure, and block copolymer
AssigneesTokyo Ohka Kogyo Co., Ltd., National University Corporation Hokkaido University
InventorsKen MIYAGI, Takahiro DAZAI, Toshifumi SATOH, Takuya ISONO, Shunma TANAKA
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Abstract
A resin composition for forming a phase-separated structure includes a block copolymer having a block (b1) formed of a repeating structure of styrene units, the block (b1) being partially substituted with a constituent unit represented by the following General Formula (c1) and a block (b2) having a repeating structure of methyl methacrylate units. In the formula, R is a hydrogen atom or a methyl group and Rc0 is a hydrophobic functional group
Claims8
A method for producing a structure including a phase-separated structure, the method comprising:
- applying a resin composition on a support to form a layer including a block copolymer;
- and
- phase-separating the layer including the block copolymer,
- wherein the resin composition comprises a block copolymer having a block (b1) formed of a repeating structure of styrene units, the block (b1) being partially substituted with a constituent unit represented by the following General Formula (c1), and a block (b2) having a repeating structure of methyl methacrylate units:
- wherein R is a hydrogen atom or a methyl group, and Rc0 is a hydrophobic functional group.
A block copolymer comprising:
- a block (b1) formed of a repeating structure of styrene units partially substituted with a constituent unit represented by the following General Formula (c1), and a block (b2) having a repeating structure of methyl methacrylate units,
- wherein in the formula, R is a hydrogen atom or a methyl group, and Rc0 is a hydrophobic functional group.
Dependencies are inferred from the claim text.