Resist underlayer composition, and method of forming patterns using the composition

A resist underlayer composition, comprising:

• (A) a polymer comprising a structural unit represented by Chemical Formula 1, a compound represented by Chemical Formula 2, or a combination thereof;
• (B) a polymer comprising a structure in which at least one moiety represented by Chemical Formula 3 or Chemical Formula 4, and a moiety represented by Chemical Formula 7 are bound to each other;
• and
• (C) a solvent:
• wherein, in Chemical Formula 1,
• R1 and R2 are each independently a hydroxy group, a substituted or unsubstituted C1 to C20 alkoxy group, a halogen, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C20 alkynyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C6 to C30 heteroaryl group, a substituted or unsubstituted vinyl group, or a combination thereof,
• L1 and L2 are each independently a single bond, a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C3 to C20 cycloalkylene group, a substituted or unsubstituted C6 to C30 arylene group, a substituted or unsubstituted C1 to C20 heteroalkylene group, a substituted or unsubstituted C2 to C20 heterocycloalkylene group, a substituted or unsubstituted C2 to C30 heteroarylene group, or a combination thereof, and
• * is a linking point;
• wherein, in Chemical Formula 2,
• R3 to R6 are each independently a hydroxy group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C1 to C30 alkoxy group, a substituted or unsubstituted C6 to C30 aryl group, or a combination thereof, and
• L3 is a single bond, a substituted or unsubstituted C1 to C30 alkylene group, a substituted or unsubstituted C6 to C30 arylene group, or a combination thereof;
• wherein, in Chemical Formulae 3 and 4,
• Ra and Rb are each independently hydrogen, deuterium, a substituted or unsubstituted C1 to C10 alkyl group, a substituted or unsubstituted C2 to C20 alkenyl group, a substituted or unsubstituted C2 to C20 vinyl group, a substituted or unsubstituted C2 to C20 alkynyl group, a substituted or unsubstituted C3 to C20 cycloalkyl group, a substituted or unsubstituted C6 to C20 aryl group, a substituted or unsubstituted C1 to C10 heteroalkyl group, a substituted or unsubstituted C2 to C20 heteroalkenyl group, a substituted or unsubstituted C3 to C20 heterocycloalkyl group, or a substituted or unsubstituted C6 to C20 heteroaryl group, or a combination thereof,
• Rc is a terminal group that is a substituted or unsubstituted C1 to C10 alkyl group, a substituted or unsubstituted C2 to C20 alkenyl group, a substituted or unsubstituted C2 to C20 alkynyl group, a substituted or unsubstituted C3 to C20 cycloalkyl group, a substituted or unsubstituted C1 to C10 heteroalkyl group, a substituted or unsubstituted C2 to C20 heteroalkenyl group, a substituted or unsubstituted C3 to C20 heterocycloalkyl group, a structural unit represented by Chemical Formula 5 or Chemical Formula 6, or a combination thereof, and
• the at least one moiety represented by Chemical Formula 3 or 4 is linked to * in Chemical Formula 7 at each * position;
• wherein, in Chemical Formulae 5 and 6,
• L3 and L4 are each independently a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C1 to C20 heteroalkylene group, or a combination thereof,
• Ra and Rb are each independently the same as defined in Chemical Formula 3 and Chemical Formula 4, and
• * is a linking point;
• and
• wherein, in Chemical Formula 7,
• A is a single bond, a substituted or unsubstituted C1 to C10 alkylene group, —C(═O)—, —(CO)O—, —O(CO)O—, or a combination thereof,
• X is a single bond, —O—, —S—, —S(═O)—, —S(═O)2—, —C(═O)—, —(CO)O—, —O(CO)O—, —NR— (wherein R is hydrogen, deuterium, or a C1 to C10 alkyl group), or a combination thereof,
• Rd is hydrogen, deuterium, a halogen, a hydroxy group, a cyano group, a nitro group, an amino group, an epoxy group, a vinyl group, a (meth)acrylate group, an oxetane group, a thiol group, a carboxyl group, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a substituted or unsubstituted C1 to C10 alkoxy group, a substituted or unsubstituted C3 to C10 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C6 to C30 aryloxy group, or a combination thereof,
• Re is one of hydrogen, deuterium, or a C1 to C10 alkyl group,
• n1 is 1 to 10,000, and
• * is linked to Chemical Formula 3 or Chemical Formula 4, or linked to hydrogen, deuterium, a halogen, a hydroxy group, a cyano group, a nitro group, an amino group, an epoxy group, a vinyl group, a (meth)acrylate group, an oxetane group, a thiol group, a carboxyl group, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a substituted or unsubstituted C1 to C10 alkoxy group, a substituted or unsubstituted C3 to C10 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C6 to C30 aryloxy group, or a combination thereof,
• provided that at least one of Chemical Formula 3 or Chemical Formula 4 is linked to * of Chemical Formula 7.