Method for closing openings in a flexible diaphragm of a mems element
AssigneeRobert Bosch GmbH
InventorsBernhard Gehl, Christoph Hermes, Juergen BUTZ
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Abstract
A method for closing openings in a flexible diaphragm of a MEMS element. The method includes: providing at least one opening in the flexible diaphragm, situating sealing material in the area of the at least one opening, melting-on at least the applied sealing material in the area of the at least one opening, and subsequently cooling the melted-on material to close the at least one opening.
Claims14
1-13. (canceled)
A method for closing openings in a flexible diaphragm of a MEMS element, comprising the following steps:
- providing at least one opening in the flexible diaphragm;
- applying sealing material in an area of the at least one opening;
- and
- melting-on at least the applied sealing material in the area of the at least one opening and subsequently cooling the melted-on sealing material to close the at least one opening.
A MEMS element including a flexible diaphragm, the flexible diaphragm including at least one opening, which is closed by melting-on an applied sealing material in an area of the at least one opening and subsequently cooling the melted-on sealing material.
Dependencies are inferred from the claim text.