Film coating apparatus and film coating method
AssigneesBoe Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Co., Ltd.
InventorsXianlin DING, Tsungchieh KUO, Qicheng CHEN
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Abstract
A film coating apparatus and a film coating method for improving the adhesion of a thin film and a substrate are provided. The substrate fixing device has an arched surface for fixing the substrate. The thin film bearing device has a bearing surface opposite to the arched surface and being detachably disposed to the bearing surface. The press roll is located at a side of the thin film away from the substrate fixing device, and may move towards the substrate and roll from one end of the thin film to the other end.
Claims18
A film coating apparatus for coating a thin film on a substrate, wherein the film coating apparatus comprises:
- a substrate fixing device having an arched surface for fixing the substrate;
- a thin film bearing device having a bearing surface opposite to the arched surface, and detachably disposed to the bearing surface;
- a press roll located at a side of the thin film away from the substrate fixing device, and movable towards the substrate and configured to roll from one end of the thin film to the other end.
Dependencies are inferred from the claim text.