Inclination adjusting mechanism

An inclination adjusting mechanism that is disposed between a base of a processing apparatus and a chuck table having a holding surface for holding a workpiece and that adjusts an inclination of the holding surface, the inclination adjusting mechanism comprising:

• an annular upper ring plate that has an upper surface for connecting the chuck table and a lower surface inclined relative to the upper surface;
• an annular lower ring plate that has an upper surface parallel to the lower surface of the upper ring plate and a lower surface parallel to the upper surface of the upper ring plate and facing an upper surface of the base;
• an upper rotating mechanism that rotates the upper ring plate with a first axis as a rotational axis, the first axis being perpendicular to the inclined lower surface of the upper ring plate and passing through a center of the upper ring plate;
• a lower rotating mechanism that rotates the lower ring plate with a second axis as a rotational axis, the second axis being perpendicular to the lower surface of the lower ring plate and passing through the center of the upper ring plate;
• a first bearing between the lower surface of the upper ring plate and the upper surface of the lower ring plate;
• a second bearing between the lower surface of the lower ring plate and the upper surface of the base;
• and
• a connecting mechanism that connects the upper ring plate, the lower ring plate, and the base,
• wherein the upper ring plate, the lower ring plate, and the base are connected by the connecting mechanism after the inclination of the holding surface is adjusted by rotating one of or both the upper ring plate and the lower ring plate.