Laser processing device and laser processing method
AssigneeShanghai Industrial µ Technology Research Institute
InventorsLI FENG, SHINAN WANG
Life of this patent
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Abstract
The present disclosure provides a laser processing device and a processing method for forming a fine structure on a substrate. The laser processing device includes a laser, a stage, an optical system, a pattern generation system, and a control system. The laser emits laser light. The stage supports the substrate. The optical system guides the laser light emitted by the laser to the substrate, thereby irradiating a light beam to the substrate, and the light beam is inclined relative to a surface of the substrate. The pattern generation system prepares a processing pattern of the fine structure. The control system controls the laser, the stage, and the optical system according to the processing pattern.
Claims10
A laser processing device for forming a fine structure on a substrate, comprising:
- a laser, which emits laser light;
- a stage, which supports the substrate;
- an optical system, which guides the laser light emitted by the laser to the substrate, thereby irradiating a light beam to the substrate, and the light beam is inclined relative to a surface of the substrate;
- a pattern generation system, which prepares a processing pattern of the fine structure;
- and
- a control system, which controls the laser, the stage, and the optical system according to the processing pattern.
A laser processing method for forming a fine structure on a substrate, comprising:
- emitting laser light by a laser;
- supporting the substrate by a stage;
- guiding the laser light emitted by the laser to the substrate by an optical system, thereby irradiating a light beam to the substrate, and the light beam is inclined relative to a surface of the substrate;
- and
- controlling the laser, the stage, and the optical system according to a processing pattern of the fine structure by a control system.
Dependencies are inferred from the claim text.