Systems and methods for improving accuracy in large area laser processing using position feedforward compensation
OwnerMark Lucas, Seetharam Sivaminventors
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Abstract
A laser processing system providing on-the-fly laser processing of a workpiece is disclosed. The laser processing system includes a positioning system configured to support the workpiece, a positioning system controller configured to control movement of the workpiece on the positioning system, a scanner system configured to scan a laser beam over the workpiece, and a scanner controller configured to operate the scanner system and the positioning system controller, the scanner controller receiving vector input data for use in feed-forward position compensation.
Claims20
A laser processing system providing on-the-fly laser processing of a workpiece, said laser processing system comprising:
- a positioning system configured to support the workpiece;
- a positioning system controller configured to control movement of the workpiece on the positioning system;
- a scanner system configured to scan a laser beam over the workpiece;
- and
- a scanner controller configured to operate the scanner system and the positioning system controller, said scanner controller receiving vector input data for use in feed-forward position compensation.
A laser processing system providing on-the-fly laser processing of a workpiece, said laser processing system comprising:
- a positioning system configured to support the workpiece;
- a positioning system controller configured to control movement of the workpiece on the positioning system;
- a scanner system configured to scan a laser beam over the workpiece;
- and
- a scanner controller configured to operate the scanner system and the positioning system controller, said scanner controller determining an anticipated vector of the positioning system for use in feed-forward position compensation.
A method of providing on-the-fly laser processing of a workpiece, said method comprising:
- providing a positioning system configured to support the workpiece;
- providing a positioning system controller configured to control movement of the workpiece on the positioning system;
- providing a scanner system configured to scan a laser beam over the workpiece;
- providing a scanner controller configured to operate the scanner system and the positioning system controller;
- operating the positioning system controller responsive to vector input data;
- and
- operating the scanner system at a positioning system delay compensated high data rate.
Dependencies are inferred from the claim text.