Extendable device
AssigneeTokyo Electron Limited
InventorTakehiro SHINDO
Life of this patent
Estimating the term…
Abstract
This extendable device includes: a base member; a first ball screw that is provided to the base member and that rotates according to a driving force supplied from a drive source; a first movable member that is coupled to the base member via the first ball screw and that moves relative to the base member as the first ball screw rotates; a second ball screw that is provided to the first movable member and that rotates as the first movable member moves; a third ball screw that is provided to the first movable member; a transmission mechanism that transmits the rotation of the second ball screw to the third ball screw; and a second movable member that is coupled to the first movable member via the third ball screw and that moves relative to the first movable member as the third ball screw rotates.
Claims12
An extendable device, comprising:
- a base member;
- a first ball screw that is provided to the base member and that rotates according to a driving force supplied from a drive source;
- a first movable member that is coupled to the base member via the first ball screw and that moves relative to the base member as the first ball screw rotates;
- a second ball screw that is provided to the first movable member and that rotates as the first movable member moves;
- a third ball screw that is provided to the first movable member;
- a transmission mechanism that transmits the rotation of the second ball screw to the third ball screw;
- and
- a second movable member that is coupled to the first movable member via the third ball screw and that moves relative to the first movable member as the third ball screw rotates.
Dependencies are inferred from the claim text.