Vaporizer
AssigneeLintec Corporation
InventorsHirofumi ONO, Shigeo YAGI, Kenta YAMAMOTO
Life of this patent
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Abstract
A vaporizer includes a tank body, a porous member disposed in the vaporizer and heated, a supply tube configured to supply a liquid material to the porous member, and a gas discharge passage configured to discharge a source gas produced by vaporizing the liquid material to the outside. An outlet of the supply tube is disposed in contact with or in close proximity to the porous member. When the outlet is disposed in close proximity to the porous member, a separation distance between the outlet and the porous member is not greater than a distance from the outlet to a bottom of a droplet of the liquid material formed and suspended at the outlet by surface tension.
Claims8
A vaporizer comprising:
- a tank body having a vaporization space therein;
- a porous member disposed in the vaporization space and heated;
- a supply tube inserted into the vaporization space from outside and configured to supply a liquid material to the porous member;
- and
- a gas discharge passage configured to discharge, from the vaporization space to the outside, a source gas produced by vaporizing the liquid material through the porous member, wherein
- an outlet of the supply tube is disposed in contact with the porous member, and
- the supply tube is provided with a micro through-hole on a side wall thereof near the outlet.
(canceled)
A vaporizer comprising:
- a tank body having a vaporization space therein;
- a porous member disposed in the vaporization space and heated;
- a supply tube inserted into the vaporization space from outside and configured to supply a liquid material to the porous member;
- and
- a gas discharge passage configured to discharge, from the vaporization space to the outside, a source gas produced by vaporizing the liquid material through the porous member, wherein
- an outlet of the supply tube is disposed in contact with the porous member, and
- an edge of the outlet of the supply tube is cut to form a notch near the outlet.
Dependencies are inferred from the claim text.