Precursor structure, lamination film of the same, and manufacturing method of ion-conducting layer using the same

A lamination film, comprising:

• a precursor structure having the following chemical formula:
• (
• La
• 2
• 
• Zr
• 2
• -
• x
• 
• M
• x
• 
• O
• 7
• )
• ·
• 1
• 2
• 
• (
• La
• 2
• -
• y
• 
• M
• y
• ′
• 
• O
• 3
• )
• ,
• wherein M is a trivalent ion or a pentavalent ion, M′ is a bivalent ion, x=0-1, y=0-1.5, and the precursor structure comprises a pyrochlore phase;
• and
• an active structure disposed on one side of the precursor structure.

A manufacturing method of an ion-conducting layer, comprising:

• laminating a precursor structure and an active structure to form a lamination film, wherein the precursor structure has the following chemical formula:
• (
• La
• 2
• 
• Zr
• 2
• -
• x
• 
• M
• x
• 
• O
• 7
• )
• ·
• 1
• 2
• 
• (
• La
• 2
• -
• y
• 
• M
• y
• ′
• 
• O
• 3
• )
• ,
• where M is a trivalent ion or a pentavalent ion, M′ is a bivalent ion, x=0-1, y=0-1.5, and the precursor structure comprises a pyrochlore phase;
• and
• heating the lamination film in a lithium-containing environment, so that the pyrochlore phase is transformed into a garnet phase.

A forming method of a solid-state ion battery series connection structure, comprising:

• providing a substrate;
• forming a plurality of lamination films on the substrate, wherein the lamination films are formed of a plurality of precursor structures and a plurality of active structures, wherein each of the precursor structures has the following chemical formula:
• (
• La
• 2
• 
• Zr
• 2
• -
• x
• 
• M
• x
• 
• O
• 7
• )
• ·
• 1
• 2
• 
• (
• La
• 2
• -
• y
• 
• M
• y
• ′
• 
• O
• 3
• )
• ,
• M is a trivalent ion or a pentavalent ion, M′ is a bivalent ion, x=0-1, y=0-1.5, and the precursor structures comprise pyrochlore phases;
• covering the lamination films with a lithium-containing diffusion sheet;
• heating the lamination films to transform the pyrochlore phases of the precursor structures into garnet phases to form a plurality of active structure lamination films;
• removing the lithium-containing diffusion sheet;
• forming a plurality of first metal layers on the substrate, wherein each of the first metal layers is adjacent to each of the active structure lamination films and disposed on one side opposite to each of the active structures;
• and
• forming a plurality of second metal layers on the substrate, wherein the second metal layers fill remaining spaces on the substrate.