Cfet sram bit cell with three stacked device decks
AssigneeTokyo Electron Limited
InventorsDaniel CHANEMOUGAME, Lars Liebmann, Jeffrey Smith
Life of this patent
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AssigneeTokyo Electron Limited
InventorsDaniel CHANEMOUGAME, Lars Liebmann, Jeffrey Smith
Estimating the term…
A static random access memory (SRAM) structure is provided. The structure includes a plurality of SRAM bit cells on a substrate. Each SRAM bit cell includes at least six transistors including at least two NMOS transistors and at least two PMOS transistors. Each of the six transistors is being lateral gate-all-around transistors in that gates wraps all around a cross section of channels of the at least six transistors. The at least six transistors positioned in three decks in which a third deck is positioned vertically above a second deck, and the second deck is positioned vertically above a first deck relative to a working surface of the substrate. A first inverter is formed using a first transistor positioned in the first deck and a second transistor positioned in the second deck. A second inverter is formed using a third transistor positioned in the first deck and a fourth transistor positioned in the second deck. A pass gate is located in the third deck.
A static random access memory (SRAM), comprising:
A static random access memory (SRAM), comprising:
A method for forming a static random access memory (SRAM) bit cell on a substrate, the method comprising:
Dependencies are inferred from the claim text.