Substrates including useful layers
AssigneesSoitec, Commissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsDidier Landru, Nadia Ben Mohamed, Oleg Kononchuk, Frédéric Mazen, Damien Massy, Shay Reboh, François Rieutord
Life of this patent
Estimating the term…
Abstract
Substrates may include a useful layer affixed to a support substrate. A surface of the useful layer located on a side of the useful layer opposite the support substrate may include a first region and a second region. The first region may have a first surface roughness, may be located proximate to a geometric center of the surface, and may occupy a majority of an area the surface. The second region may have a second, higher surface roughness, may be located proximate to a periphery of the surface, and may occupy a minority of the area of the surface.
Claims20
A substrate, comprising:
- a useful layer affixed to a support substrate;
- wherein a surface of the useful layer located on a side of the useful layer opposite the support substrate comprises:
- a first region comprising a first surface roughness, the first region located proximate to a geometric center of the surface, the first region occupying a majority of an area the surface;
- and
- a second region comprising a second, higher surface roughness, the second region located proximate to a periphery of the surface, the second region occupying a minority of the area of the surface.
A substrate, comprising:
- a useful layer comprising a semiconductor material affixed to a support substrate;
- wherein a surface of the useful layer located on a side of the useful layer opposite the support substrate comprises:
- a first region configured to emit a first haze, the first region located proximate to a geometric center of the surface, the first region occupying a majority of an area the surface;
- and
- a second region configured to emit a second, higher haze, the second region located proximate to a periphery of the surface, the second region occupying a minority of the area of the surface.
Dependencies are inferred from the claim text.