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US 2021/0202287 A1Published application
Structure and method of reticle pod having inspection window
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWANG CHENG SHIH, HAO-MING CHANG, CHUNG-YANG HUANG, CHENG-MING LIN
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Abstract
The structure and methods of a reticle pod are provided. A reticle pod includes a base configured to support a reticle and a cover detachably coupled to the base. The cover includes a window that allows radiation at a wavelength between about 400 nm and about 700 nm to pass through with a transmittance of greater than 70%.
Claims20
A reticle pod, comprising:
- a base configured to support a reticle;
- and
- a cover configured to form a sealed space with the base, the cover comprising a window having:
- a window body;
- and
- a transparent film on two sides of the window body,
- wherein the window is configured to allow radiation of a predetermined wavelength to pass through with a transmittance of greater than 70%.
4 more elements
A reticle pod, comprising:
- a base configured to support a reticle;
- and
- a cover detachably coupled to the base, wherein the cover comprises a window that allows radiation at a wavelength between about 400 nm and about 700 nm to pass through with a transmittance of greater than 70%.
A method of manufacturing a reticle, comprising:
- performing a first operation for forming a pattern on the reticle;
- disposing the reticle in a reticle pod, the reticle pod comprising a base and a cover configured to form a sealed space with the base, and the cover comprising a window configured to allow a radiation at a predetermined wavelength to pass through;
- and
- performing an inspection operation on the reticle through the window.
1 more element
Dependencies are inferred from the claim text.