Chemical liquid supplying system and method of supplying chemical liquid

A method of testing a chemical liquid in a fabrication facility, comprising:

• moving a drum which stores the chemical liquid from a storage system to a position next to a chemical liquid supplying system;
• moving the drum into a chamber in the chemical liquid supplying system through a front door;
• connecting the drum with a testing pipe;
• guiding the chemical liquid in the drum into the testing pipe;
• detecting a condition of the chemical liquid in the testing pipe;
• determining if the condition of the chemical liquid is acceptable;
• and
• when the condition of the chemical liquid is not acceptable, removing the drum from the chamber of the chemical liquid supplying system.

A chemical liquid supplying system, comprising:

• a chamber;
• a roller located in the chamber;
• a connecting module located in the chamber and above the roller;
• a testing pipe connected to the connecting module;
• a liquid detection assembly positioned relative to the testing pipe;
• and
• a control module electrically connected to liquid detection assembly and configured to determine if the chemical liquid is acceptable or not.