Mems dual substrate switch with magnetic actuation
AssigneeInnovative Micro Technology
InventorsChristopher S. GUDEMAN, Marin SIGURDSON
Life of this patent
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Abstract
Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.
Claims20
A method for manufacturing and using a magnetic MEMS switch, comprising:
- forming at least two electrical contacts on a second substrate
- forming a movable plate on a first substrate, wherein the movable plate is coupled to the first substrate by a plurality of restoring springs;
- forming a conductive shunt bar on the movable plate, wherein the shunt bar is dimensioned to span the two electrical contacts;
- and
- forming a permeable magnetic feature on at least one of the first and the second substrates, wherein the permeable magnetic feature has a non-uniform cross section;
- coupling the first substrate to the second substrate with an adhesive bond to form the magnetic MEMS switch.
A magnetic MEMS switch, comprising:
- a movable plate formed on a first substrate, wherein the movable plate is coupled to the first substrate by a plurality of restoring springs;
- at least two electrical contacts formed on a second substrate;
- an electrically conductive shunt bat formed on the movable plate, dimensioned so as to span the two electrical contacts;
- at least one permeable magnetic feature inlaid into at least one of the first and the second substrates, wherein the at least one permeable feature has a non-uniform cross section;
- and
- a seal which couples the first substrate to the second substrate, and seals the MEMS switch, such that the MEMS switch operated by disposing a source of magnetic field gradient in a vicinity of the magnetic MEMS switch, wherein the gradient is sufficient to move the movable plate and open or close the switch.
Dependencies are inferred from the claim text.