Shape characteristic value estimation apparatus, shape characteristic value estimation method, and storage medium

A shape characteristic value estimation apparatus, comprising:

• a processed-image acquisition part configured to acquire a processed image including image information related to a surface of a substrate on which a target film is formed;
• an estimation part configured to estimate a shape characteristic value of the target film, by applying, to the processed image, an estimation model for estimating the shape characteristic value of the target film, the estimation model being associated with a correlation between information related to a color of the surface of the substrate included in the processed image and the shape characteristic value, wherein the shape characteristic value is a characteristic value related to a shape of the target film formed on the substrate;
• an underlying influence model creation part configured to create an underlying influence model which is a model associated with a correlation between a difference between an estimation result of the shape characteristic value of the target film by the estimation part and a shape characteristic value of the target film acquired without using the estimation model, and information related to a color of a surface of an underlying substrate which is a substrate before the target film is formed, and
• an estimated-result correction part configured to correct the estimation result of the shape characteristic value of the target film by the estimation part based on the underlying influence model.