Scattering Measurement Analysis Method, Scattering Measurement Analysis Device, And Non-Transitory Computer-Readable Storage Medium Storing Scattering Measurement Analysis Program

A scattering measurement analysis device, comprising theoretical scattering intensity obtaining means for obtaining a theoretical scattering intensity from a structural model that consists a lot of scatterers,

• wherein the theoretical scattering intensity obtaining means is configured to obtain a contribution to the theoretical scattering intensity of a pair of a scatterer “m” and a scatterer “n” existing at a distance “r” from the scatterer “m” among a plurality of scatterers by at least one of calculations in accordance with the distance “r”, the calculations including a first calculation of calculating contributions of the scatterer “m” and the scatterer “n” from respective scattering factors fm(q) and fn*(q) and a center-to-center distance rmn between the scatterer “m” and the scatterer “n”, and a second calculation of substituting the scattering factor fn*(q) of the scatterer “n” by a first representative value and substituting a probability density function of the number of scatterers existing at the distance “r” by a constant value.

A non-transitory computer-readable storage medium storing a scattering measurement analysis program for causing a computer to function as theoretical scattering intensity obtaining means for obtaining a theoretical scattering intensity from a structural model that consists a lot of scatterers, the scattering measurement analysis program causing a computer to execute processing comprising:

• wherein the theoretical scattering intensity obtaining means is configured to obtain a contribution to the theoretical scattering intensity of a pair of a scatterer “m” and a scatterer “n” existing at a distance “r” from the scatterer “m” among a plurality of scatterers by at least one of calculations in accordance with the distance “r”, the calculations including a first calculation of calculating contributions of the scatterer “m” and the scatterer “n” from respective scattering factors fm(q) and fn*(q) and a center-to-center distance rmn between the scatterer “m” and the scatterer “n”, and a second calculation of substituting the scattering factor fn*(q) of the scatterer “n” by a first representative value and substituting a probability density function of the number of scatterers existing at the distance “r” by a constant value.