Back to results
US 2021/0200180 A1Published application
Multiaxis Machining Device and Compensation Method Thereof
AssigneeNational Chung Shan Institute of Science and Technology
InventorsYi-Yuh Hwang, Li-Chung Liu
Life of this patent
Estimating the term…
Abstract
The present invention provides a planar three-dimensional displacement sensor for a multiaxis machining device. With the measurement of the (planar) three-dimensional displacement sensor in the multiaxis machining device, the multiaxis machining device and a multiaxis machining compensation method are able to eliminate various deformation effects effectively.
Claims16
A three-dimensional displacement sensor, comprising:
- a secure element, wherein the secure element is a hollowed shell and has a first outer wall, a second outer wall, a third outer wall, a fourth outer wall, and a fifth outer wall, wherein each of the first outer wall, the second outer wall, the third outer wall, the fourth outer wall and the fifth outer wall has a hole, wherein the first outer wall and the third outer wall face an x-axis of the secure element, wherein the second outer wall and the fourth outer wall face a y-axis of the secure element, wherein the fifth outer wall faces a z-axis of the secure element;
- a first displacement sensing component, comprising a first coherent light source and a first light source sensor arranged in pairs on the first outer wall and the third outer wall;
- a second displacement sensing component, comprising a second coherent light source and a second light source sensor arranged in pairs on the second outer wall and the fourth outer wall;
- and
- a third displacement sensing component, wherein the third displacement sensing component is a laser confocal displacement sensor, a color confocal displacement sensor, a white light interference displacement sensor, or a triangulation laser displacement sensor, wherein the third displacement sensing component is disposed on the fifth outer wall.
2 more elements
A multiaxis machining device, comprising:
- a reference positioning base, made of low thermal expansion material;
- a translation platform support, disposed beneath the reference positioning base, wherein the translation platform support comprises a support body, an x-axis slide shaft, a y-axis slide shaft, and a z-axis slide shaft, wherein the x-axis slide shaft is coupled to the y-axis slide shaft, wherein the x-axis slide shaft is slidable along the y-axis slide shaft, wherein the y-axis slide shaft and the z-axis slide shaft are confined in the support body, wherein a bright spot ruler made of low thermal expansion material is arranged on one side of the z-axis slide shaft;
- a first slider module, comprising a first slider, wherein the first slider is coupled to the x-axis slide shaft, wherein the first slider is slidable along the x-axis slide shaft;
- a second slider module, comprising a second slider, wherein the second slider is coupled to the z-axis slide shaft, wherein the second slider is slidable along the z-axis slide shaft;
- a first three-dimensional displacement sensor, fixed to the first slider module;
- a second three-dimensional displacement sensor, fixed to the second slider module;
- and
- a third three-dimensional displacement sensor, fixed to the bright spot ruler.
5 more elements
A multiaxis machining compensation method, comprising steps of:
- providing a multiaxis machining device, wherein the multiaxis machining device comprises:
- a reference positioning base, made of low thermal expansion material;
- a translation platform support, disposed beneath the reference positioning base, wherein the translation platform support comprises a support body, an x-axis slide shaft, a y-axis slide shaft, and a z-axis slide shaft, wherein the x-axis slide shaft is coupled to the y-axis slide shaft, wherein the x-axis slide shaft is slidable along the y-axis slide shaft, wherein the y-axis slide shaft and the z-axis slide shaft are confined in the support body, wherein a bright spot ruler made of low thermal expansion material is arranged on one side of the z-axis slide shaft;
- a first slider module, comprising a first slider, wherein the first slider is coupled to the x-axis slide shaft, wherein the first slider is slidable along the x-axis slide shaft;
- a second slider module, comprising a second slider, wherein the second slider is coupled to the z-axis slide shaft, wherein the second slider is slidable along the z-axis slide shaft;
- a first three-dimensional displacement sensor, fixed to the first slider module;
- a second three-dimensional displacement sensor, fixed to the second slider module;
- and
- a third three-dimensional displacement sensor, fixed to the bright spot ruler;
- fixing the first three-dimensional displacement sensor to the first slider or the first jig tool of the first slider module, measuring the reference positioning base, and obtaining x-axis displacement, y-axis displacement, and z-axis displacement of the first slider or the first jig tool with respect to the reference positioning base to serve as a first three-dimensional displacement;
- fixing the second three-dimensional displacement sensor to the second slider or the second jig tool of the second slider module, measuring the bright spot ruler, and obtaining x-axis displacement, y-axis displacement, and z-axis displacement of the second slider or the second jig tool with respect to the bright spot ruler to serve as a second three-dimensional displacement;
- fixing the third three-dimensional displacement sensor to the bright spot ruler, measuring the reference positioning base, and obtaining x-axis displacement, y-axis displacement, and z-axis displacement of the bright spot ruler with respect to the reference positioning base to serve as a third three-dimensional displacement;
- providing a machining compensation processor to obtain a machining processing displacement and a compensation displacement;
- and
- adjusting positions of the first slider or the first jig tool and the second slider or the second jig tool and performing feedback control of the multiaxis machining device in machining and compensation according to the machining processing displacement and the compensation displacement.
12 more elements
Dependencies are inferred from the claim text.