Semiconductor apparatus and method for baking coating layer
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYUNG-YAO LEE, CHEN YI HSU
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Abstract
The present disclosure provides an apparatus for fabricating a semiconductor structure, including an air flow redistribution member configured to receive an air flow at a first end and eject the air flow at a second end. The air flow redistribution member includes a first air flow redistribution plate and a second air flow redistribution plate between the first air flow redistribution plate and the second end.
Claims34
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An apparatus for fabricating a semiconductor structure, comprising:
- a chamber, comprising a top surface;
- an exhaust member connected to the chamber;
- an air flow redistribution member connected to the exhaust member, comprising:
- a first air flow redistribution plate, wherein a portion of the first air flow redistribution plate is under a coverage of a vertical projection area of the top surface of the chamber;
- and
- a heating member disposed at a surface of the air flow redistribution member.
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An apparatus for fabricating a semiconductor structure, comprising:
- a chamber;
- an exhaust member connected to the chamber;
- and
- an air flow redistribution member connected to the exhaust member, configured to receive an air flow at a first end and eject the air flow at a second end, the air flow redistribution member comprising:
- a first air flow redistribution plate extending in a vertical direction;
- and
- a second air flow redistribution plate between the first air flow redistribution plate and the second end.
An apparatus for fabricating a semiconductor structure, comprising:
- a chamber;
- an exhaust member connected to the chamber;
- and
- an air flow redistribution member connected to the exhaust member, configured to receive an air flow at a first end and eject the air flow at a second end, the air flow redistribution member comprising:
- an opening at a first level and proximal to the first end;
- and
- a stripe apart from the first end and positioned at the first level.
Dependencies are inferred from the claim text.