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US 2021/0200093 A1Published application
Coating composition for photoresist underlayer
AssigneeRohm and Haas Electronic Materials Korea Ltd.
InventorsJin Hong Park, Yoo-Jin Ghang, Suwoong Kim, You Rim Shin, Jung June Lee, Jae Hwan Sim
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Abstract
A coating composition comprising a crosslinkable polyester polymer comprising an isocyanurate group and a crosslinkable group; a crosslinker; and an acid catalyst, wherein at least one of the crosslinkable polyester polymer and the crosslinker comprises an iodine-containing polymer.
Claims10
A coating composition, comprising:
- a crosslinkable polyester polymer comprising an isocyanurate group and a crosslinkable group;
- a crosslinker;
- and
- an acid catalyst;
- wherein at least one of the crosslinkable polymer and the crosslinker comprises an iodine-containing polymer.
2 more elements
Dependencies are inferred from the claim text.