Resist composition and method of forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsYoichi HORI, Yasuhiro YOSHII, Yosuke SUZUKI, Takahiro KOJIMA, Mari MURATA
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Abstract
A resist composition containing a resin component exhibiting changed solubility in a developing solution under action of acid, and a compound represented by General Formula (d0), the resin component containing a polymer compound having a constitutional unit having a monocyclic alicyclic hydrocarbon group, Rd0 represents a monovalent organic group; Xd0 represents —O—, —C(═O)—, —O—C(═O)—, —C(═O)—O—, —S—, or —SO2—; Ydx0 represents a single bond or the like; Rd001 to Rd004 represents a hydrogen atom or the like; and Mm+ represents an m-valent organic cation
Claims6
A resist composition which generates an acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition comprising:
- a resin component (A1) exhibiting changed solubility in a developing solution under action of acid;
- and
- a compound (D0) represented by General Formula (d0),
- wherein the resin component (A1) contains a polymer compound having a constitutional unit (a01) represented by General Formula (a01-1):
- wherein Rd0 represents a monovalent organic group;
- Xd0 represents —O—, —C(═O)—, —O—C(═O)—, —C(═O)—O—, —S—, or —SO2—;
- Ydx0 represents a single bond or a divalent hydrocarbon group which may have a substituent;
- Rd001 and Rd002 each independently represent a hydrogen atom, a fluorine atom, or an alkyl group;
- Rd003 and Rd004 each independently represent a hydrogen atom or a fluorine atom;
- nd1 represents 0 or 1;
- Mm+ represents an m-valent organic cation;
- and m represents an integer of 1 or more;
- wherein, in General Formula (a01-1), R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms;
- Va01 represents a divalent hydrocarbon group which may have an ether bond;
- na01 represents an integer of 0 to 2;
- and Ra00 represents an acid-dissociable group represented by General Formula (a01-r-1), and wherein, in General Formula (a01-r-1), Ra001 to Ra003 each independently represents a chain alkyl group which may have a substituent or a monocyclic alicyclic hydrocarbon group which may have a substituent, and in a case where Ra002 and Ra003 represent a chain alkyl group which may have a substituent, Ra002 and Ra003 may be bonded to each other to form a monocyclic alicyclic hydrocarbon group;
- and * represents a bonding site.
Dependencies are inferred from the claim text.