Resist composition and method of forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMari MURATA, Takahiro KOJIMA, Yasuhiro YOSHII, Yosuke SUZUKI, Yoichi HORI
Life of this patent
Estimating the term…
Loading patent…
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMari MURATA, Takahiro KOJIMA, Yasuhiro YOSHII, Yosuke SUZUKI, Yoichi HORI
Estimating the term…
A resist composition containing a compound (D0) represented by General Formula (d0) and a polymer compound having a constitutional unit (a01) containing an acid-decomposable group having a polarity which is increased by action of an acid and a constitutional unit (a02) derived from a compound represented by General Formula (a02-1), and a solid content concentration is 5% by mass or less. In General Formula (d0), Rd0 represents a monovalent organic group, Xd0 represents —O— or the like, Yd0 represents a single bond, and Mm+ represents an m-valent organic cation. In General Formula (a02-1), Wax0 represents a cyclic group having an (nax0+1)-valent aromaticity which may have a substituent
A resist composition which generates an acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition comprising:
Dependencies are inferred from the claim text.