Imprinting method using a solvent to remove a mold and the related imprinting system

An imprinting method, comprising:

• adding a soluble material to a master mold;
• solidifying the soluble material to form a soluble mold having a mold pattern;
• adhering a taking device to the soluble mold to separate the soluble mold from the master mold;
• placing the soluble mold on a polymer layer of a workpiece for imprint;
• applying a first temperature and a pressure to the soluble mold to allow the polymer layer having an imprint pattern corresponding to the mold pattern and to remove the taking device from the soluble mold;
• applying a second temperature to the soluble mold, the second temperature being higher than the first temperature, to allow the polymer layer being solidified;
• and
• providing a solvent to dissolve the soluble mold to obtain an imprint workpiece having the imprint pattern.

An imprinting system, comprising:

• a working platform configured for a workpiece for imprint, a soluble mold, and a taking device being deposited thereon, the workpiece for imprint having a substrate layer and a polymer layer positioned on the substrate layer, the soluble mold positioned on the polymer layer of the workpiece for imprint and having a mold pattern and a first alignment mark, and the taking device adhered to the soluble mold;
• wherein the substrate layer has a second alignment mark, the working platform has a third alignment mark, or the polymer layer has a fourth alignment mark;
• and
• a camera configured for determining whether the first alignment mark and the second alignment mark are aligned with each other, the first alignment mark and the third alignment mark are aligned with each other, or the first alignment mark and the fourth alignment mark are aligned with each other.