Microelectromechanical apparatus and projection apparatus

A projection apparatus, comprising an illumination system, a light valve, and a projection lens, wherein:

• the illumination system comprises at least one laser light source and at least one microelectromechanical apparatus, wherein the at least one laser light source is configured to emit at least one laser light beam, the illumination system forms an illumination light beam through the at least one laser light beam, the at least one microelectromechanical apparatus is disposed on a transmission path of the at least one laser light beam, the at least one microelectromechanical apparatus comprises a substrate, a light diffuser device, a plurality of actuator devices, and a controller, wherein
• the light diffuser device is disposed on the substrate, wherein the substrate and the light diffuser device are disposed on the transmission path of the at least one laser light beam,
• the actuator devices are disposed around the substrate and coupled to the substrate, and
• the controller is coupled to the plurality of actuator devices,
• wherein the controller is configured to apply a voltage to at least one of the plurality of actuator devices to drive the substrate and to control the light diffuser device to actuate according to a reference axis perpendicular to the light diffuser device,
• the light valve is disposed on a transmission path of the illumination light beam, wherein the light valve converts the illumination light beam into an image light beam, and
• the projection lens is disposed on a transmission path of the image light beam.