Liquid crystal light deflection apparatus and method of manufacturing liquid crystal light deflection apparatus
AssigneesTianma Japan, Ltd., Wuhan Tianma Micro-Electronics Co., Ltd.
InventorsYukie KEICHO, Jin MATSUSHIMA, Tetsushi SATO
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Abstract
A liquid crystal light deflection apparatus includes a first substrate including a first electrode, a second substrate including a second electrode, and liquid crystals sandwiched between the first substrate and the second substrate. A high-resistivity layer is provided on at least one of the first electrode or the second electrode. The high-resistivity layer is covered sequentially by a first barrier layer formed from metal oxide and a second barrier layer formed from metal nitride or metal carbide.
Claims7
A liquid crystal light deflection apparatus comprising:
- a first substrate including a first electrode;
- a second substrate including a second electrode;
- and
- liquid crystals sandwiched between the first substrate and the second substrate, wherein
- a high-resistivity layer is provided on at least one of the first electrode or the second electrode, and
- the high-resistivity layer is covered sequentially by a first barrier layer formed from metal oxide and a second barrier layer formed from metal nitride or metal carbide.
A method of manufacturing a liquid crystal light deflection apparatus comprising:
- preparing a first substrate including a first electrode and a second substrate including a second electrode;
- forming a high-resistivity layer on at least one of the first electrode or the second electrode;
- forming a first barrier layer from of a metal oxide to cover the high-resistivity layer such that surfaces of the high-resistivity layer are unexposed from the first barrier layer;
- and
- forming a second barrier layer from metal nitride or metal carbide on the first barrier layer.
Dependencies are inferred from the claim text.